Pneumatic Spring Apparatus, Vibration-Proof Apparatus, Stage Apparatus and Exposure Apparatus

• US 20080013058A1
• Filed: 03/01/2005
• Published: 01/17/2008
• Est. Priority Date: 03/01/2004
• Status: Abandoned Application

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Tatsuzaki, Yosuke
• Application Number:
  US10/591,670
• Publication Number:
  US 20080013058A1
• Time in Patent Office: Days
• US Class Current: 355/53
• CPC Class Codes: F16F 15/027 comprising control arrangements F16F15/0237 takes precedence
• CPC Class Codes: F16F 9/52 in case of change of temperature F16F9/003 takes precedence; combined with external adjustment F16F9/44
• CPC Class Codes: G03F 7/70833 Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground
• CPC Class Codes: G03F 7/709 Vibration, e.g. vibration detection, compensation, suppression or isolation

Abstract

A high performance pneumatic spring apparatus is provided without increasing the sizes of the apparatus. The pneumatic spring apparatuses KB1-KB4 are provided with gas chambers AR filled with a gas at a prescribed pressure. The gas chamber AR is provided with an adjustment apparatus SW for adjusting a temperature change due to the capacity change of the gas chamber AR.

Claims

1. A pneumatic spring apparatus having a gas chamber filled with a gaseous substance of a predetermined pressure, comprising a regulating device provided in the gas chamber for regulating a temperature change produced according to a volume change of the gas chamber.

2. The pneumatic spring apparatus of claim 1, wherein the regulating device is a solid or a liquid exhibiting a greater specific heat or heat transfer rate than the gaseous substance.

3. The pneumatic spring apparatus of claim 1 or 2, wherein the regulating device is fiber-shaped steel.

4. The pneumatic spring apparatus of claim 1 or 2, wherein the regulating device is adapted to make a polytropic index for a dynamic spring constant smaller than a polytropic index of the air.

5. The pneumatic spring apparatus of claim 1 or 2, wherein the regulating device includes a gas formed of a mixture of saturated vapor and liquid filled in the gas chamber in a gas liquid mixed phase condition.

6. The pneumatic spring apparatus of claim 1 or 2, wherein the regulating device is adapted to allow a volume of the gas chamber to be changed nearly isothermally.

7. The pneumatic spring apparatus of claim 1 or 2, further comprising a stirring device for stirring the gaseous substance in the gas chamber.

8. An anti-vibration apparatus comprising:

a support device for supporting a target anti-vibration object with a gaseous substance of a predetermined pressure; and

a drive device for driving the target anti-vibration object,

wherein the pneumatic spring apparatus of claim 1 or 2 is employed as the support device.

9. A stage apparatus in which a movable body is moved on a surface plate, wherein the surface plate is supported by the anti-vibration apparatus of claim 8.

10. An exposure apparatus for use in exposing patterns of a mask held on a mask stage onto a photosensitive substrate held on a substrate stage through a projection optical system, wherein at least one of the mask stage, the projection optical system and the substrate stage is supported by the anti-vibration apparatus of claim 8.

11. An anti-vibration method comprising the steps of:

filling a gaseous substance of a predetermined pressure into a gas chamber; and

regulating a temperature change produced according to a volume change of the gas chamber.

12. The anti-vibration method of claim 11, wherein a solid or a liquid exhibiting a greater specific heat or heat transfer rate than the gaseous substance is filled in the gas chamber.

13. The anti-vibration method of claim 11 or 12, wherein fiber-shaped steel is filled in the gas chamber.

14. The anti-vibration method of claim 11 or 12, wherein a polytropic index for a dynamic spring constant is made smaller than a polytropic index of the air.

15. The anti-vibration method of claim 11 or 12, wherein a gas formed of a mixture of saturated vapor and liquid is filled in the gas chamber in a gas liquid mixed phase condition.

16. The anti-vibration method of claim 11 or 12, wherein a volume of the gas chamber is changed nearly isothermally.

17. The anti-vibration method of claim 11 or 12, wherein the gaseous substance in the gas chamber is stirred.