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Support Apparatus, Stage Apparatus, Exposure Apparatus, And Device Manufacturing Method

  • US 20080013060A1
  • Filed: 07/22/2005
  • Published: 01/17/2008
  • Est. Priority Date: 07/23/2004
  • Status: Abandoned Application
First Claim
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1. A support apparatus comprising:

  • a cylinder portion;

    a piston portion that is provided inside the cylinder portion and is movable in a first direction;

    a fluid bearing formed in at least a portion between an inner wall of the cylinder portion and an outer wall of the piston portion, the support apparatus supporting a supported member in the first direction with respect to a support member by means of a biasing force generated by the cylinder portion and the piston portion, wherein first and second fluids are supplied independently inside the fluid bearing and the cylinder, respectively.

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