Exposure apparatus, maintenance method, exposure method, and method for producing device
First Claim
Patent Images
1. An exposure apparatus which exposes a substrate by irradiating an exposure light onto the substrate through a liquid, comprising:
- a liquid immersion system which forms a liquid immersion area with the liquid on the substrate; and
an exchange system which exchanges a liquid immersion member which constructs a part of the liquid immersion system and makes contact with the liquid forming the liquid immersion area.
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Accused Products
Abstract
An exposure apparatus EX includes a liquid immersion system and an exchange system which performs exchange of the liquid immersion member. The exchange system has a holding device which holds the liquid immersion member detachably and a transport device. By using the exchange system, it is possible to suppress the lowering in the working rate due to the cleaning or exchange of the liquid immersion member.
47 Citations
59 Claims
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1. An exposure apparatus which exposes a substrate by irradiating an exposure light onto the substrate through a liquid, comprising:
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a liquid immersion system which forms a liquid immersion area with the liquid on the substrate; and
an exchange system which exchanges a liquid immersion member which constructs a part of the liquid immersion system and makes contact with the liquid forming the liquid immersion area. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 40)
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27. An exposure apparatus which exposes a substrate by irradiating an exposure light onto the substrate through a liquid, the exposure apparatus comprising:
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a liquid immersion system which forms a liquid immersion area with the liquid on the substrate;
a liquid immersion member which makes contact with the liquid forming the liquid immersion area; and
a holding device which detachably holds the liquid immersion member. - View Dependent Claims (28, 29, 30, 31, 32, 33, 34, 41)
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35. An exposure apparatus which exposes a substrate with an exposure light through a liquid, the exposure apparatus comprising:
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a liquid immersion member which surrounds a space between the substrate and an optical member via which the exposure light exits, and in which at least a part of a liquid immersion area of the liquid is formed;
a frame member on which the liquid immersion member is provided; and
a supporting device in which delivery and receipt of the liquid immersion member is performed to and from the frame member. - View Dependent Claims (36, 37, 38, 39, 42)
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43. A maintenance method for an exposure apparatus having a liquid immersion member to which a substrate is arranged opposite and exposing the substrate through a liquid retained by the liquid immersion member, the method comprising:
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detaching the liquid immersion member from the exposure apparatus; and
cleaning the detached liquid immersion member or exchanging the detached liquid immersion member with another liquid immersion member. - View Dependent Claims (44, 45, 46, 47, 48, 49, 52, 57)
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- 50. A maintenance method for an exposure apparatus having a liquid immersion member which retains a liquid between an optical element and a substrate and exposing the substrate with an exposure light via the optical element and the liquid, the method comprising loading and unloading the liquid immersion member to exchange or clean the liquid immersion member.
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54. An exposure method for exposing a substrate with an exposure light through a liquid, the method comprising:
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exposing the substrate with the exposure light while retaining the liquid in a space between the substrate and an optical member, via which the exposure light exits, by a liquid immersion member surrounding the space; and
loading and unloading the liquid immersion member to exchange or clean the liquid immersion member. - View Dependent Claims (55, 56, 59)
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Specification