MICROELECTROMECHANICAL DEVICE WITH OPTICAL FUNCTION SEPARATED FROM MECHANICAL AND ELECTRICAL FUNCTION
First Claim
Patent Images
1. A microelectromechanical (MEMS) device comprising:
- a first reflective layer;
a movable element over the first reflective layer, the movable element comprising a deformable layer and a reflective element; and
an actuation electrode between the deformable layer and the reflective element.
3 Assignments
0 Petitions
Accused Products
Abstract
A microelectromechanical (MEMS) device includes a first reflective layer, a movable element, and an actuation electrode. The movable element is over the first reflective layer. The movable element includes a deformable layer and a reflective element. The actuation electrode is between the deformable layer and the reflective element.
167 Citations
34 Claims
-
1. A microelectromechanical (MEMS) device comprising:
-
a first reflective layer;
a movable element over the first reflective layer, the movable element comprising a deformable layer and a reflective element; and
an actuation electrode between the deformable layer and the reflective element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
-
-
19. A microelectromechanical (MEMS) device comprising:
-
means for moving a portion of the device, the moving means comprising means for deforming and first means for reflecting light;
second means for reflecting light; and
means for actuating the moving means, the actuating means between the deforming means and the first reflecting means. - View Dependent Claims (20, 21, 22, 23, 24)
-
-
25. A method of manufacturing a microelectromechanical (MEMS) device, the method comprising:
-
forming a first sacrificial layer over a reflective layer;
forming a reflective element over the first sacrificial layer;
forming a second sacrificial layer over the reflective element;
forming an actuation electrode over the second sacrificial layer;
forming a third sacrificial layer over the actuation electrode;
forming a deformable layer over the third sacrificial layer, the deformable layer mechanically coupled to the reflective element; and
removing the first, second, and third sacrificial layers. - View Dependent Claims (26, 27, 28, 29, 30, 31)
-
-
32. A method of modulating light, the method comprising:
-
providing a display element comprising a reflective layer, a movable element over the reflective layer, and an actuation electrode, the movable element comprising a deformable layer and a reflective element, the actuation electrode between the deformable layer and the reflective element; and
applying a voltage to the actuation electrode, the voltage generating a first attractive force in a first direction on a first portion of the movable element and generating a second attractive force in a second direction on a second portion of the movable element, the second direction substantially opposite to the first direction, the first attractive force greater than the second attractive force, thereby causing the movable element to move generally in the first direction. - View Dependent Claims (33, 34)
-
Specification