HIGH CONTRAST SPATIAL LIGHT MODULATOR
First Claim
Patent Images
1. A spatial light modulator, comprising:
- a substrate having a plurality of electrodes;
a mirror plate suspended over the plurality of electrodes, the mirror plate having an upper reflective surface and a lower surface, the mirror plate having an upper layer and a lower layer, the upper layer formed of a highly reflective first material and the lower layer formed of a different second material;
a support post on the substrate; and
a torsion hinge connecting the support post to the mirror plate, the torsion hinge positioned in the recess of the mirror plate and permitting the mirror plate to rotate about an axis of the torsion hinge;
wherein at least one of the lower layer, the support post and the torsion hinge are formed of doped silicon.
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Abstract
A high contrast spatial light modulator for display and printing is fabricated by coupling a high active reflection area fill-ratio and non-diffractive micro mirror array with a high electrostatic efficiency and low surface adhesion control substrate.
29 Citations
18 Claims
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1. A spatial light modulator, comprising:
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a substrate having a plurality of electrodes;
a mirror plate suspended over the plurality of electrodes, the mirror plate having an upper reflective surface and a lower surface, the mirror plate having an upper layer and a lower layer, the upper layer formed of a highly reflective first material and the lower layer formed of a different second material;
a support post on the substrate; and
a torsion hinge connecting the support post to the mirror plate, the torsion hinge positioned in the recess of the mirror plate and permitting the mirror plate to rotate about an axis of the torsion hinge;
wherein at least one of the lower layer, the support post and the torsion hinge are formed of doped silicon. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification