Method And Apparatus For The Monitoring And Control Of A Process
First Claim
1. A diode laser spectroscopy gas sensing apparatus comprising:
- a diode laser having a select lasing frequency;
a pitch optic optically coupled to the diode laser, the pitch optic being operatively associated with a process chamber and oriented to project laser light along a projection beam through the process chamber;
a catch optic in optical communication with the pitch optic to receive the laser light projected through the process chamber;
an optical fiber optically coupled to the catch optic;
a catch side alignment mechanism operatively associated with the catch optic providing for the alignment of the catch optic with respect to the projection beam to maxamize a quantity of laser light received by the catch optic from the pitch optic and coupled to the optical fiber; and
a detector sensitive to the select lasing frequency optically coupled to the optical fiber.
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Accused Products
Abstract
A diode laser spectroscopy gas sensing apparatus having a diode laser with a select lasing frequency, a pitch optic coupled to the diode laser with the pitch optic being operatively associated with a process chamber and oriented to project laser light along a projection beam through the process chamber. This embodiment additionally includes a catch optic in optical communication with the pitch optic to receive the laser light projected through the process chamber and an optical fiber optically coupled to the catch optic. In addition, the catch optic is operatively associated with a catch side alignment mechanism which provides for the alignment of the catch optic with respect to the projection beam to increase a quantity of laser light received by the catch optic from the pitch optic and coupled to the optical fiber and a detector sensitive to the select lasing frequency optically coupled to the optical fiber. The catch side alignment mechanism may consist of means to tilt the catch optic along a first axis and a second axis orthogonal to the first axis with both the first and second axes being approximately orthogonal to the projection beam.
40 Citations
13 Claims
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1. A diode laser spectroscopy gas sensing apparatus comprising:
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a diode laser having a select lasing frequency;
a pitch optic optically coupled to the diode laser, the pitch optic being operatively associated with a process chamber and oriented to project laser light along a projection beam through the process chamber;
a catch optic in optical communication with the pitch optic to receive the laser light projected through the process chamber;
an optical fiber optically coupled to the catch optic;
a catch side alignment mechanism operatively associated with the catch optic providing for the alignment of the catch optic with respect to the projection beam to maxamize a quantity of laser light received by the catch optic from the pitch optic and coupled to the optical fiber; and
a detector sensitive to the select lasing frequency optically coupled to the optical fiber. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method of aligning a diode laser spectroscopy gas sensing optical system comprising:
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providing an alignment beam of light;
projecting the alignment beam through a process chamber;
receiving the alignment beam with a catch optic, the catch optic being operatively associated with the process chamber;
optically coupling the alignment beam from the catch optic to a detector through an optical fiber;
determining the strength of the alignment beam coupled from the catch optic to the optical fiber; and
aligning the catch optic to maximize the strength of the alignment beam coupled from the catch optic to the optical fiber. - View Dependent Claims (10, 11, 12, 13)
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Specification