MEMS device and method of reducing stiction in a MEMS device
First Claim
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1. A MEMS device, comprising:
- a substrate;
a movable mass suspended in proximity to the substrate; and
at least one suspension structure coupled to the movable mass for performing a mechanical spring function,wherein the at least one suspension structure has portions that move in tandem when the MEMS device is subject to a stimulus along at least one sensing direction, and wherein the at least one suspension structure further includes at least one link between the portions that move in tandem.
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Abstract
A MEMS device includes a substrate; a movable mass suspended in proximity to the substrate; and at least one suspension structure coupled to the movable mass for performing a mechanical spring function. The at least one suspension structure has portions that move in tandem when the MEMS device is subject to at least one stimulus in a sensing direction, and further includes at least one link between the portions that move in tandem.
18 Citations
20 Claims
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1. A MEMS device, comprising:
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a substrate; a movable mass suspended in proximity to the substrate; and at least one suspension structure coupled to the movable mass for performing a mechanical spring function, wherein the at least one suspension structure has portions that move in tandem when the MEMS device is subject to a stimulus along at least one sensing direction, and wherein the at least one suspension structure further includes at least one link between the portions that move in tandem. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method of reducing stiction in a MEMS device having a substrate, a movable mass suspended in proximity to the substrate, and at least one suspension structure coupled to the movable mass for performing a mechanical spring function and including portions that move in tandem when the MEMS device is subject to a stimulus along at least one sensing direction, the method comprising:
providing at least one link between the portions that move in tandem. - View Dependent Claims (15, 16, 17, 18, 19, 20)
Specification