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MEMS Device with a Closed Cellular Core Sandwiched Structure

  • US 20080018975A1
  • Filed: 07/17/2007
  • Published: 01/24/2008
  • Est. Priority Date: 07/18/2006
  • Status: Active Grant
First Claim
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1. A micro-mirror device comprising:

  • a mirrored platform including a sandwich structure having an upper uniform, smooth and uninterrupted layer;

    a core layer having a closed cellular structure; and

    a lower uniform, smooth and uninterrupted layer;

    a hinge structure enabling the mirrored platform to rotate about an axis of rotation above a substrate; and

    attracting means for rotating the mirrored platform about the axis of rotation.

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