Method of manufacturing semiconductor device and plasma processing apparatus

• US 20080020584A1
• Filed: 03/20/2007
• Published: 01/24/2008
• Est. Priority Date: 03/24/2006
• Status: Abandoned Application

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Suzuki, Yoshinori, Hirotsu, Shin
• Application Number:
  US11/725,559
• Publication Number:
  US 20080020584A1
• Time in Patent Office: Days
• US Class Current: 438/725
• CPC Class Codes: H01L 21/31116 by dry-etching
• CPC Class Codes: H01L 21/31138 by dry-etching
• CPC Class Codes: H01L 21/31144 using masks
• CPC Class Codes: H01L 21/76808 involving intermediate temporary filling with material

Abstract

The method of manufacturing a semiconductor device according to the present invention includes a step of etching an organic film formed to be embedded in recesses in a low dielectric constant film which is made of a material containing silicon, carbon, oxygen, and hydrogen. The organic film is typically a sacrifice film formed on the low dielectric constant film to be embedded in recesses formed in the low dielectric constant for embedding electrodes therein. The etching is performed with plasma of a process gas containing carbon dioxide. With the method, the organic film can be etched while suppressing damage to the low dielectric constant film.

Claims

1. A method of manufacturing a semiconductor device, the method comprising the steps of:

preparing an object to be processed including a substrate, a low dielectric constant film formed on the substrate, having recesses, being made of a material containing silicon, carbon, oxygen, and hydrogen, and an organic film formed on the low dielectric constant film so as to be embedded in the recesses; and

etching the organic film of the object to be processed by plasma of a process gas containing carbon dioxide.

2. The method of manufacturing a semiconductor device according to claim 1,

wherein the recesses of the low dielectric constant film are used to embed electrodes, and the organic film is a sacrifice film formed on the low dielectric constant film so that the organic film is embedded in the recesses that are used to embed electrodes.

3. The method of manufacturing a semiconductor device according to claim 2,

wherein the recesses are viaholes that are used to embed electrodes for connecting both wiring of an upper layer and a lower layer in a multi-layer wiring structure;

and

wherein the organic film constitutes a bottom layer in a resist structure having a plurality of layers.

4. The method of manufacturing a semiconductor device according to claim 1,

wherein the process gas further contains a nitrogen gas.

5. The method of manufacturing a semiconductor device according to claim 2,

wherein the process gas further contains a nitrogen gas.

6. The method of manufacturing a semiconductor device according to claim 3,

wherein the process gas further contains a nitrogen gas.

7. The method of manufacturing a semiconductor device according to claim 1,

wherein the low dielectric constant film has a dielectric constant of 2.7 or less.

8. The method of manufacturing a semiconductor device according to claim 2,

wherein the low dielectric constant film has a dielectric constant of 2.7 or less.

9. The method of manufacturing a semiconductor device according to claim 3,

wherein the low dielectric constant film has a dielectric constant of 2.7 or less.

10. The method of manufacturing a semiconductor devices according to claim 4,

wherein the low dielectric constant film has a dielectric constant of 2.7 or less.

11. The method of manufacturing a semiconductor device according to claim 5,

wherein the low dielectric constant film has a dielectric constant of 2.7 or less.

12. The method of manufacturing a semiconductor device according to claim 6,

wherein the low dielectric constant film has a dielectric constant of 2.7 or less.

19. A computer readable storage medium comprising control programs for performing the method for manufacturing a semiconductor device according to claim 1 in a plasma processing apparatus.

20. A computer readable storage medium comprising control programs for performing the method for manufacturing a semiconductor device according to claim 2 in a plasma processing apparatus.

13. A plasma processing apparatus for etching a object to be processed including a substrate, a low dielectric constant film formed on the substrate, having recesses, being made of a material containing silicon, carbon, oxygen, and hydrogen, and an organic film formed on the low dielectric constant film so as to be embedded in the recesses, the plasma processing apparatus comprising:

a processing chamber;

a lower electrode which is placed in the processing cahmber and on which the object to be processed is mounted;

an upper electrode facing the lower electrode;

a gas supply system for supplying a process gas containing cabon dioxide, the process gas being used to etch an organic film of the object to be processed; and

a high-frequency power supply for applying high-frequency power between the lower electrode and the upper electrode to convert the process gas into plasma.

14. The plasma processing apparatus according to claim 13,

wherein the recesses of the low dielectric constant film are used to embed electrodes;

and

wherein the organic film is a sacrifice film formed on the low dielectric constant film so that the organic film is embedded in the recesses for embedding the electrodes.

15. The plasma processing apparatus according to claim 14,

wherein the recesses are viaholes for embedding electrodes for connecting both wiring of an upper layer and a lower layer in a multi-layer wiring structure;

and

wherein the organic film constitutes a bottom layer in a resist structure having a plurality of layers.

16. The plasma processing apparatus according to claim 13,

wherein the gas supply system supplies the process gas further containing a nitrogen gas.

17. The plasma processing apparatus according to claim 14,

wherein the gas supply system supplies the process gas further containing a nitrogen gas.

18. The plasma processing apparatus according to claim 15,

wherein the gas supply system supplies the process gas further containing a nitrogen gas.