Method and System for Providing a Selection of Golden Tools for Better Defect Density and Product Yield
First Claim
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1. A method for improving a yield of a product, the method comprising:
- selecting a set of golden tools from a set of manufacturing tools based on performances of the set of manufacturing tools; and
providing a fully automated operational environment to produce a product using the set of golden tools.
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Abstract
Aspects of the present disclosure provide a method and a system for providing a selection of golden tools for better defect density and product yield. A golden tool selection and dispatching system is provided to integrate different components for robust golden tool selection and dispatching. The golden tool selection system selects a set of golden tools based on performance of a set of manufacturing tools and provides a fully automated operational environment to produce a product using the set of golden tools.
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Citations
20 Claims
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1. A method for improving a yield of a product, the method comprising:
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selecting a set of golden tools from a set of manufacturing tools based on performances of the set of manufacturing tools; and providing a fully automated operational environment to produce a product using the set of golden tools. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A computer-readable medium having encoded thereon a process comprising:
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selecting a set of golden tools from a set of manufacturing tools based on performances of the set of manufacturing tools; and providing a fully automated operational environment to produce a product using the set of golden tools.
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20. A system for improving a yield of a product, the system comprising:
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a selecting module operable to select a set of golden tools from a set of manufacturing tools based on performances of the set of manufacturing tools; and a fully automated operational environment operable to produce a product using the set of golden tools.
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Specification