Capacitively coupled plasma reactor with magnetic plasma control
First Claim
1. A wafer processing apparatus, comprising:
- a housing defining a process chamber a wafer support configured to support a wafer within the chamber during processing;
a first process gas inlet;
a second process gas inlet;
a gas distribution system, comprising;
a center circular gas disperser configured to receive a process gas from the first process gas inlet and to distribute the process gas into the chamber over the wafer through a first plurality of injection ports; and
an outer annular gas disperser centered around the center gas disperser configured to receive the process gas from the second process gas inlet and to distribute the process gas into the chamber over the wafer through a second plurality of injection ports.
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Abstract
A plasma reactor includes a vacuum enclosure including a side wall and a ceiling defining a vacuum chamber, and a workpiece support within the chamber and facing the ceiling for supporting a planar workpiece, the workpiece support and the ceiling together defining a processing region between the workpiece support and the ceiling. Process gas inlets furnish a process gas into the chamber. A plasma source power electrode is connected to an RF power generator for capacitively coupling plasma source power into the chamber for maintaining a plasma within the chamber. The reactor further includes at least a first overhead solenoidal electromagnet adjacent the ceiling, the overhead solenoidal electromagnet, the ceiling, the side wall and the workpiece support being located along a common axis of symmetry.
113 Citations
21 Claims
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1. A wafer processing apparatus, comprising:
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a housing defining a process chamber a wafer support configured to support a wafer within the chamber during processing;
a first process gas inlet;
a second process gas inlet;
a gas distribution system, comprising;
a center circular gas disperser configured to receive a process gas from the first process gas inlet and to distribute the process gas into the chamber over the wafer through a first plurality of injection ports; and
an outer annular gas disperser centered around the center gas disperser configured to receive the process gas from the second process gas inlet and to distribute the process gas into the chamber over the wafer through a second plurality of injection ports. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A wafer processing apparatus, comprising:
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a housing defining a processing chamber, the housing coupled to an RF ground;
a substrate support located in a chamber configured to support a wafer during processing;
first and second process gas inlets configured to deliver a process gas into the chamber;
a gas distribution system comprising a circular gas disperser having a circular center gas dispersing region fluidly coupled to the first process gas inlet and an annular gas dispersing region surrounding the center region and fluidly coupled to the second process gas inlet, wherein the center gas dispersing region comprises a first plurality of gas injection holes configured to introduce the process gas into the chamber above a wafer supported on the substrate support and the annular gas dispersing region comprises a second plurality of gas injection holes configured to introduce the process gas into the chamber annularly to the center gas dispersion region above the wafer; and
an RF generator coupled to an impedance match circuit used to provide RF power to the wafer support, wherein the impedance match circuit is coupled to the wafer support and wherein the RF generator is coupled to the RF ground. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15)
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16. A wafer processing apparatus, comprising:
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a vacuum chamber configured to support a plasma;
a process gas inlet configured to deliver a process gas used for the plasma into the vacuum chamber;
a gas disperser coupled to the process gas inlet, comprising;
a base having a plurality of injection ports formed throughout, surrounded by an annular wall having an interior shoulder;
a cover having a top surface, a bottom surface and a plurality of fingers, the plurality of fingers attached to the bottom surface and extending downwardly from the bottom surface, the top surface coupled to the process gas inlet; and
wherein the fingers extend into the injection ports of the base to form a plurality of annular ports in the base for the process gas to flow from the gas disperser to a processing region. - View Dependent Claims (17, 18, 19, 20, 21)
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Specification