Patterning device utilizing sets of stepped mirrors and method of using same

• US 20080024745A1
• Filed: 07/31/2006
• Published: 01/31/2008
• Est. Priority Date: 07/31/2006
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Baselmans, Johannes Matheus, Tinnemans, Patricius Aloysius Jacobus
• Granted Patent: US 7,738,077 B2
• Time in Patent Office: Days
• US Class Current: 355/67
• CPC Class Codes: G03F 7/70283 Mask effects on the imaging process
• CPC Class Codes: G03F 7/70291 Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices

Abstract

A system and method are used to independently control multiple parameters of a patterned beam. This can be performed using a patterning device configured to pattern a beam of radiation comprising a controller and an array of stepped mirrors. The array comprises a plurality of sets of four of the stepped mirrors that are controlled with respect to each other. Adjacent ones of the stepped mirrors in each of the sets have perpendicular axes of rotation and perpendicular steps. In one example, the patterning device is used to patterned the beam of radiation, which patterned beam is projected onto an object. For example, the object can be a substrate (e.g., semiconductor substrate or flat panel display substrate) or a display device.

Claims

1. A lithography apparatus, comprising:

an illumination system configured to condition a beam of radiation;

a patterning device configured to pattern the beam of radiation, the patterning device comprising a controller and an array of stepped mirrors configured to pattern the beam of radiation, the array comprising a plurality of sets of the stepped mirrors, the stepped mirrors being controlled by the controller with respect to each other, adjacent ones of the stepped mirrors in each of the sets having perpendicular axes of rotation and perpendicular steps; and

a projection system configured to project the patterned beam onto a target area of a substrate.

2. The lithography apparatus of claim 1, wherein the controller is configured to rotate adjacent ones of the stepped mirrors in each of the sets to equal, but opposite magnitude, tilt angles.

3. The lithography apparatus of claim 1, wherein the controller is configured to control the array to produce an image corresponding to the patterned beam, the image being telecentric at the substrate.

4. The lithography apparatus of claim 1, wherein the controller is configured to control the array to produce an image having a uniform polarization illumination profile at the substrate.

5. The lithography apparatus of claim 1, wherein a step in the stepped mirrors comprise a quarter of a wavelength step.

6. The lithography apparatus of claim 1, wherein the stepped mirrors are configured to rotate to multiple rotation angles.

7. The lithography apparatus of claim 1, wherein the controller is configured to control the array to form an image corresponding to the patterned beam at the substrate equivalent to an image formed by an alternating phase shift mask.

8. The lithography apparatus of claim 1, wherein:

a first pair of the stepped mirrors in each of the sets has a first step position; and

a second pair of the stepped mirrors in each of the sets has a second step position, a difference between the first and second step positions being half of a wavelength.

26. The lithography apparatus of claim 1, wherein the sets of the stepped mirrors includes four of the stepped mirrors.

9. A patterning device configured to pattern a beam of radiation, comprising:

a controller; and

an array of stepped mirrors, the array comprising a plurality of sets of the stepped mirrors, the stepped mirrors being controlled by the controller with respect to each other, adjacent ones of the stepped mirrors in each of the sets having perpendicular axes of rotation and perpendicular steps.

10. The patterning device of claim 9, wherein the controller is configured to rotate adjacent ones of the stepped mirrors in each of the sets to equal, but opposite magnitude, tilt angles.

11. The patterning device of claim 9, wherein the controller is configured to control the array to produce an image, the image being telecentric at the substrate.

12. The patterning device of claim 9, wherein the controller is configured to control the array to produce an image having a uniform polarization illumination profile at a substrate or display device.

13. The patterning device of claim 9, wherein a step in the stepped mirrors comprise a quarter of a wavelength step.

14. The patterning device of claim 9, wherein the stepped mirrors are configured to rotate to multiple rotation angles.

15. The patterning device of claim 9, wherein the controller is configured to control the array to form an image at a substrate or display device equivalent to an image formed by an alternating phase shift mask.

16. The patterning device of claim 9, wherein:

a first pair of the stepped mirrors in each of the sets has a first step position; and

a second pair of the stepped mirrors in each of the sets has a second step position, a difference between the first and second step positions being half of a wavelength.

27. The patterning device of claim 9, wherein the sets of the stepped mirrors includes four of the stepped mirrors.

17. A method, comprising:

(a) rotating a first stepped mirror, in a set of four stepped mirrors, the first stepped mirror having a first step position and first rotation direction to a first rotation angle;

(b) rotating a second stepped mirror in the set having a second step position and a second rotation direction to the first rotation angle;

(c) rotating a third stepped mirror in the set having a third step position and a third rotation direction to a second rotation angle that is equal, but opposite, to the first rotation angle; and

(d) rotating a fourth stepped mirror in the set having a fourth step position and a fourth rotation direction to the second rotation angle.

22. The method of claim 17, further comprising forming the first through fourth steps of the respective first through fourth stepped mirrors as quarter of a wavelength steps.

24. The method of claim 17, further comprising:

using a first step position for a first pair of the stepped mirrors in each of the sets; and

using a second step position for a second pair of the stepped mirrors in each of the sets, a difference between the first and second step positions being half of a wavelength.

25. The method of claim 17, wherein:

the first and third stepped mirrors rotate above an X-axis; and

the second and fourth stepped mirrors rotate with respect to an X-Y plane.

18. The method of clam 17, further comprising:

patterning a beam of radiation using a plurality of the sets of four stepped mirrors; and

projecting the patterned beam onto a target portion of an object.

19. The method of claim 18, wherein the object is a substrate or a display device.

20. The method of claim 18, wherein steps (a)-(d) produce a telecentric image at the object.

21. The method of claim 18, wherein steps (a)-(d) produce an image having a uniform polarization illumination profile at the object.

23. The method of claim 18, wherein the rotating steps (a)-(d) produce an image at the object equivalent to an image formed by an alternating phase shift mask.