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Low mass six degree of freedom stage for lithography tools

  • US 20080024749A1
  • Filed: 05/18/2007
  • Published: 01/31/2008
  • Est. Priority Date: 05/18/2006
  • Status: Abandoned Application
First Claim
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1. An apparatus, comprising:

  • a mover configured to support and move an object in a scanning direction in a lithography tool, the mover including;

    a coarse stage; and

    a fine stage configured to support the object and supported by the coarse stage, the fine stage movable in six degrees of freedom by a set of actuators, wherein, all of the actuators contribute to accelerating the object and the fine stage in the scanning direction.

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