Sapphire alignment fixture
First Claim
Patent Images
1. A metrology system comprising:
- a support structure;
a fixture having a bottom surface resting on a surface of the support structure and moveable relative to the support structure; and
a first measurement assembly for interacting with a workpiece held by the fixture to measure a characteristic of the workpiece,wherein one of the bottom surface of the fixture and the surface of the support structure comprises sapphire, and the other of the bottom surface of the fixture and the surface of the support structure comprises a metal.
5 Assignments
0 Petitions
Accused Products
Abstract
A metrology system comprises a support structure, a fixture having a bottom surface resting on a surface of the support structure and moveable relative to the support structure, and a first measurement assembly for interacting with a workpiece held by the fixture to measure a characteristic of the workpiece. One of the bottom surface of the fixture and the surface of the support structure comprises sapphire, and the other of the bottom surface of the fixture and the surface of the support structure comprises a metal.
-
Citations
20 Claims
-
1. A metrology system comprising:
-
a support structure; a fixture having a bottom surface resting on a surface of the support structure and moveable relative to the support structure; and a first measurement assembly for interacting with a workpiece held by the fixture to measure a characteristic of the workpiece, wherein one of the bottom surface of the fixture and the surface of the support structure comprises sapphire, and the other of the bottom surface of the fixture and the surface of the support structure comprises a metal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
-
-
11. A method for measuring a characteristic of a workpiece, comprising:
-
loading a workpiece into a fixture that rests on a support structure, wherein interfacing surfaces of the fixture and the support structure have a coefficient of friction in a certain range; moving the workpiece and a first measurement assembly relative to each other so that the workpiece is aligned with the first measurement assembly; moving a component of the first measurement assembly to contact the workpiece to obtain a first measurement of a characteristic of the workpiece, wherein when the component contacts the workpiece, the fixture is adapted to slide on the support structure in response to a force exerted on the workpiece and the fixture by the component; and receiving and calculating the first measurement of the characteristic of the workpiece. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18)
-
-
19. A metrology system comprising:
-
a support structure; a fixture having a bottom surface resting on a surface of the support structure and moveable relative to the support structure; and a first measurement assembly for interacting with a workpiece held by the fixture to measure a characteristic of the workpiece, wherein a surface of the fixture that abuts the workpiece to hold the workpiece comprises sapphire. - View Dependent Claims (20)
-
Specification