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CAPACITIVE ACCELERATING SENSOR BONDING SILICON SUBSTRATE AND GLASS SUBSTRATE

  • US 20080028856A1
  • Filed: 02/27/2007
  • Published: 02/07/2008
  • Est. Priority Date: 08/07/2006
  • Status: Abandoned Application
First Claim
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1. A capacitive acceleration sensor comprising:

  • a silicon substrate including a movable electrode having a comb shape and a fixed electrode having a comb shape opposed to the comb shape of the movable electrode; and

    a pair of glass substrates having a concave portion forming a cavity on at least one side thereof,wherein the silicon substrate and the glass substrates are bonded to each other so that the movable electrode and the fixed electrode are disposed in the cavity.

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