CAPACITIVE ACCELERATING SENSOR BONDING SILICON SUBSTRATE AND GLASS SUBSTRATE
First Claim
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1. A capacitive acceleration sensor comprising:
- a silicon substrate including a movable electrode having a comb shape and a fixed electrode having a comb shape opposed to the comb shape of the movable electrode; and
a pair of glass substrates having a concave portion forming a cavity on at least one side thereof,wherein the silicon substrate and the glass substrates are bonded to each other so that the movable electrode and the fixed electrode are disposed in the cavity.
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Abstract
Provided is a capacitive acceleration sensor including a silicon substrate, which includes a movable electrode having a comb shape and a fixed electrode having a comb shape opposed to the comb shape of the movable electrode, and a pair of glass substrates having a concave portion forming a cavity on at least one side thereof, wherein the silicon substrate and the glass substrates are bonded to each other so that the movable electrode and the fixed electrode is disposed in the cavity. Accordingly, it is possible to provide the capacitive acceleration sensor having a small size and high sensitivity.
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Citations
8 Claims
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1. A capacitive acceleration sensor comprising:
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a silicon substrate including a movable electrode having a comb shape and a fixed electrode having a comb shape opposed to the comb shape of the movable electrode; and a pair of glass substrates having a concave portion forming a cavity on at least one side thereof, wherein the silicon substrate and the glass substrates are bonded to each other so that the movable electrode and the fixed electrode are disposed in the cavity. - View Dependent Claims (2, 3, 4, 7)
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5. A method of manufacturing a capacitive acceleration sensor, the method comprising:
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manufacturing a silicon substrate including a movable electrode having a comb shape and a fixed electrode having a comb shape opposed to the comb shape of the movable electrode; and bonding the silicon substrate and a pair of glass substrates so that the movable electrode and the fixed electrode are disposed in a cavity by using the pair of glass substrates having a concave portion forming the cavity on at least one side thereof. - View Dependent Claims (6, 8)
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Specification