Insert Molded Actuator Components
First Claim
1. A method of making an electrostatically actuated device component comprising:
- providing a multilayered structure comprisinga first layer comprising a first polymer;
a second layer comprising a conductive material, the second layer disposed over the first layer;
a third layer comprising a dielectric material, the third layer disposed over the second layer, the third layer having a surface roughness (Rq) of less than about 1000 angstroms;
positioning the multilayered structure within an injection mold; and
injecting a second polymer into the mold and bonding the first layer to the second polymer to produce an electrostatically actuated device component.
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Accused Products
Abstract
The present invention relates to electrostatically actuated device components and methods of making the same. In an embodiment, the invention includes a method of making an electrostatically actuated device component including providing a multilayered structure comprising a first layer comprising a first polymer, a second layer comprising a conductive material, the second layer disposed over the first layer, a third layer comprising a dielectric material, the third layer disposed over the second layer, positioning the multilayered structure within an injection mold, and injecting a second polymer into the mold and bonding the first layer to the second polymer to produce an electrostatically actuated device component. In an embodiment, the invention includes a method of injection molding a stator component for an electrostatically actuated valve.
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Citations
20 Claims
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1. A method of making an electrostatically actuated device component comprising:
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providing a multilayered structure comprising a first layer comprising a first polymer; a second layer comprising a conductive material, the second layer disposed over the first layer; a third layer comprising a dielectric material, the third layer disposed over the second layer, the third layer having a surface roughness (Rq) of less than about 1000 angstroms; positioning the multilayered structure within an injection mold; and injecting a second polymer into the mold and bonding the first layer to the second polymer to produce an electrostatically actuated device component. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A method of injection molding a stator component for an electrostatically actuated valve comprising:
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disposing a planar conductive assembly within an injection mold, the planar conductive assembly comprising a support layer comprising a first polymer; a conductive layer comprising a first side and a second side, the first side coupled to the support layer; a dielectric layer comprising a second polymer, the dielectric layer covering the entirety of the second side of the conductive layer; injecting a third polymer into the injection mold to produce a stator component. - View Dependent Claims (18, 19)
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20. A method of forming a component of an electrostatically actuated device comprising:
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extruding a first polymer to form a support layer; disposing a conductive material on the support layer to form a conductive layer extending continuously over the support layer; disposing a dielectric material on the conductive layer to form a dielectric layer having a surface roughness (Rq) of between about 100 angstroms and 1000 angstroms; placing the support layer, the conductive layer, and the dielectric layer within an injection mold defining a cavity, with the support layer facing the interior of the cavity; filling the cavity with a second polymer to form the component of the electrostatically actuated device; and removing the component of the electrostatically actuated device from the injection mold.
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Specification