×

Physical quantity sensor

  • US 20080030205A1
  • Filed: 06/12/2007
  • Published: 02/07/2008
  • Est. Priority Date: 06/13/2006
  • Status: Active Grant
First Claim
Patent Images

1. A physical quantity sensor for detecting a physical quantity comprising:

  • a first substrate having a first physical quantity detection element;

    a second substrate having a second physical quantity detection element, wherein the second substrate contacts the first substrate; and

    an accommodation space disposed between the first substrate and the second substrate, wherein the first physical quantity detection element is disposed in the accommodation space.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×