Physical quantity sensor
First Claim
1. A physical quantity sensor for detecting a physical quantity comprising:
- a first substrate having a first physical quantity detection element;
a second substrate having a second physical quantity detection element, wherein the second substrate contacts the first substrate; and
an accommodation space disposed between the first substrate and the second substrate, wherein the first physical quantity detection element is disposed in the accommodation space.
1 Assignment
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Accused Products
Abstract
A physical quantity sensor for detecting a physical quantity includes: a first substrate having a first physical quantity detection element; a second substrate having a second physical quantity detection element, wherein the second substrate contacts the first substrate; and an accommodation space disposed between the first substrate and the second substrate. The first physical quantity detection element is disposed in the accommodation space. The first physical quantity detection element is protected with the first substrate and the second substrate since the first physical quantity detection element is sealed in the accommodation space.
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Citations
26 Claims
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1. A physical quantity sensor for detecting a physical quantity comprising:
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a first substrate having a first physical quantity detection element;
a second substrate having a second physical quantity detection element, wherein the second substrate contacts the first substrate; and
an accommodation space disposed between the first substrate and the second substrate, wherein the first physical quantity detection element is disposed in the accommodation space. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A physical quantity sensor for detecting a physical quantity comprising:
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a first substrate having a first physical quantity detection element; and
a second substrate having at least a processing circuit for processing an output signal from the first physical quantity detection element, wherein the second substrate faces and contacts the first substrate so that an accommodation space is provided between the first substrate and the second substrate. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26)
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Specification