Deformable Mirrors
First Claim
1. A controllably-deformable mirror comprising:
- a first electro-restrictive plate;
a mirror surface;
a set of electrodes defined as regions on a first surface of the first electro-restrictive plate, the set of electrodes comprising a first electrode and a second electrode;
a common electrode on a second surface of the first electro-restrictive plate;
a set of contacts removed from the set of electrodes, the set of contacts including a first contact electrically connected to the first electrode and a second contact electrically connected to the second electrode;
a set of conducting tracks to electrically connect the set of electrodes to the set of contacts;
and a passivation layer interposed between the set of conducting tracks and the set of electrodes and adapted to mutually insulate the set of electrodes.
1 Assignment
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Accused Products
Abstract
The invention resides in the innovative use of deposition techniques in deformable mirrors. The use of deposition techniques allows contact pads for electrodes to be located wherever convenient. When applied to bimorph mirrors the invention enables both electro-restrictive layers to become active, increasing the stroke of the deformable mirror whilst retaining temperature insensitivity. A controllably-deformable mirror according to the invention comprises a deposition layer; a first electro-restrictive plate; a mirror surface; and a plurality of electrodes comprising a set of electrodes defined as regions on a first surface of the first electro-restrictive plate, the set of electrodes comprising a first electrode and a second electrode; and a common electrode on a second surface of the first electro-restrictive plate.
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Citations
40 Claims
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1. A controllably-deformable mirror comprising:
- a first electro-restrictive plate;
a mirror surface;
a set of electrodes defined as regions on a first surface of the first electro-restrictive plate, the set of electrodes comprising a first electrode and a second electrode;
a common electrode on a second surface of the first electro-restrictive plate;
a set of contacts removed from the set of electrodes, the set of contacts including a first contact electrically connected to the first electrode and a second contact electrically connected to the second electrode;
a set of conducting tracks to electrically connect the set of electrodes to the set of contacts;
and a passivation layer interposed between the set of conducting tracks and the set of electrodes and adapted to mutually insulate the set of electrodes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 26, 27)
- a first electro-restrictive plate;
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25. (canceled)
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28. (canceled)
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29. A method of manufacturing a controllably-deformable mirror having an electro-restrictive plate, comprising the steps of:
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defining a set of electrodes, comprising a first electrode and a second electrode, on a first surface of the electro-restrictive plate;
depositing a passivation layer adapted to mutually insulate the set of electrodes; and
applying a mirror surface. - View Dependent Claims (30, 31, 32, 33, 34, 35, 36, 37, 38, 39)
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40. (canceled)
Specification