Display methods and apparatus

• US 20080030827A1
• Filed: 10/01/2007
• Published: 02/07/2008
• Est. Priority Date: 02/23/2005
• Status: Active Grant

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Pixtronix, Incorporated (Qualcomm, Inc.)
• Inventors: Steyn, Jasper, Hagood, Nesbitt
• Granted Patent: US 7,636,189 B2
• Time in Patent Office: Days
• US Class Current: 359/227
• CPC Class Codes: G02B 26/02 for controlling the intensity of light G02B26/004 takes precedence
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

The invention relates to spatial light modulators for use in display apparatus. In particular, the invention relates to spatial light modulators that include a substrate defining a plane and a shutter suspended over the substrate by a compliant beam. The compliant beam has a cross-sectional thickness, in a dimension parallel to the plane of the substrate, between about 0.2 μm and about 10 μm. In one embodiment, a thickness of the compliant beam in a dimension perpendicular to the plane of the substrate is at least about 1.4 times the cross-sectional width of the compliant beam in the dimension parallel to the plane of the substrate.

Claims

1. A spatial light modulator comprising:

a substrate defining a plane; and

a shutter suspended over the substrate by a compliant beam, wherein a cross-sectional width of the compliant beam in a dimension parallel to the plane of the substrate is between about 0.2 μ

m and about 10 μ

m.

2. The spatial light modulator of claim 1, wherein the cross-sectional width of the compliant beam is between about 0.5 μ

m and about 5 μ

m.

3. The spatial light modulator of claim 1, wherein the cross-sectional width of the compliant beam is between about 0.2 μ

m and about 2 μ

m.

4. The spatial light modulator of claim 1, wherein the cross-sectional width of the compliant beam is between about 0.2 μ

m and about 1.5 μ

m.

5. The spatial light modulator of claim 1, wherein the cross-sectional width of the compliant beam is between about 0.2 μ

m and about 1 μ

m.

6. The spatial light modulator of claim 1, wherein a width of the compliant beam in a dimension perpendicular to the plane of the substrate is at least about 1.4 times the cross-sectional width of the compliant beam in the dimension parallel to the plane of the substrate.