Hinge Design for Enhanced Optical Performance for a Digital Micro-Mirror Device
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Abstract
An apparatus for use with a digital micro-mirror 100 includes a hinge 116 disposed outwardly from a substrate 102. The hinge 116 is capable of at least partially supporting a micro-mirror 104 disposed outwardly from the hinge 116. The micro-mirror 104 is capable of being selectively transitioned between an on-state position and an off-state position. In one particular embodiment, the hinge 116 comprises a substantially flat profile for at least a portion of the hinge 116 disposed between a first hinge post 108 of the hinge 116 and a mid-point of the hinge 116. The apparatus also includes a plurality of process control voids formed within a conductive layer 120 disposed inwardly from the hinge 116. In one particular embodiment, the substantially flat profile is at least partially created from the plurality of process control voids.
16 Citations
39 Claims
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1-20. -20. (canceled)
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21. A method of forming a micromechanical device comprising:
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a substrate;
forming a hinge structure comprising a supported region, a supporting region, and an intermediate region between said supported region and said supporting region, said supported region supported by and spaced apart from said substrate by a first distance, said supporting region spaced apart from said substrate by a second distance, and said intermediate region spaced apart from said substrate by a third distance, said third distance selected from the group consisting of distances greater than both said first and second distance and distances less than both said first and second distance. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39)
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Specification