X-ray diffraction apparatus
First Claim
1. An X-ray diffraction apparatus comprising:
- an X-ray source which generates X-ray to be irradiated on a sample;
an X-ray detector which detects X-ray emitted from the sample;
a divergence slit which is disposed between the X-ray source and the sample, the slit width of which can be controlled;
a scattering slit which is disposed between the sample and the X-ray detector, the slit width of which is constant;
a θ
-rotator which changes the incident angle (θ
) of X-ray emitted from the X-ray source and entering the sample through the divergence slit;
a 2θ
-rotator which changes the diffracted X-ray detection angle (2θ
) at which the X-ray detector detects X-ray diffracted by the sample and passed through the scattering slit; and
a divergence slit width controller which controls the slit width of the divergence slit, whereinthe X-ray incident angle (θ
) is changed by the θ
-rotator, the diffracted X-ray detection angle (2θ
) is changed by the 2θ
-rotator such that the diffracted X-ray detection angle (2θ
) at which the X-ray detector detects X-ray is kept at an angle double that of the X-ray incident angle (θ
);
the slit width of the divergence slit is controlled by the divergence slit width controller such that the irradiation width of X-ray to be irradiated on the sample is made constant during a change in the X-ray incident angle (θ
),the slit width of the scattering slit is kept constant, andX-ray emitted from the sample is detected by the X-ray detector.
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Accused Products
Abstract
Disclosed is an X-ray apparatus having an X-ray source, an X-ray detector, a divergence slit, and a scattering slit. The incident angle θ of X-ray to be irradiated on a sample is changed at a predetermined angular speed at measurement time and diffracted X-ray detection angle 2θ at which the X-ray detector detects X-ray is changed in the opposite direction to the θ-direction at an angular speed double that of the X-ray incident angle θ. The slit width of the divergence slit is changed such that the X-ray irradiation width always coincides with the sample width while the slit width of the scattering slit is retained at a constant value. The width of X-ray received by the X-ray detector is restricted by the narrower one of the divergence slit and the scattering slit. The resolution in the high angle region can be kept at a high level.
5 Citations
6 Claims
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1. An X-ray diffraction apparatus comprising:
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an X-ray source which generates X-ray to be irradiated on a sample; an X-ray detector which detects X-ray emitted from the sample; a divergence slit which is disposed between the X-ray source and the sample, the slit width of which can be controlled; a scattering slit which is disposed between the sample and the X-ray detector, the slit width of which is constant; a θ
-rotator which changes the incident angle (θ
) of X-ray emitted from the X-ray source and entering the sample through the divergence slit;a 2θ
-rotator which changes the diffracted X-ray detection angle (2θ
) at which the X-ray detector detects X-ray diffracted by the sample and passed through the scattering slit; anda divergence slit width controller which controls the slit width of the divergence slit, wherein the X-ray incident angle (θ
) is changed by the θ
-rotator, the diffracted X-ray detection angle (2θ
) is changed by the 2θ
-rotator such that the diffracted X-ray detection angle (2θ
) at which the X-ray detector detects X-ray is kept at an angle double that of the X-ray incident angle (θ
);the slit width of the divergence slit is controlled by the divergence slit width controller such that the irradiation width of X-ray to be irradiated on the sample is made constant during a change in the X-ray incident angle (θ
),the slit width of the scattering slit is kept constant, and X-ray emitted from the sample is detected by the X-ray detector. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification
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- Resources
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Current AssigneeRigaku Corporation
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Original AssigneeRigaku Corporation
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InventorsDosho, Akihide
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Granted Patent
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Time in Patent OfficeDays
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Field of Search
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US Class Current378/81
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CPC Class CodesG01N 23/20 by using diffraction of the...
