Apparatus and method for a singulation of polymer waveguides using photolithography

• US 20080031584A1
• Filed: 08/02/2006
• Published: 02/07/2008
• Est. Priority Date: 08/02/2006
• Status: Abandoned Application

• Current Assignee: POA Sana Liquidating Trust
• Original Assignee: National Semiconductor Corporation (Texas Instruments, Inc.)
• Inventors: Payne, Jonathan
• Application Number:
  US11/498,356
• Publication Number:
  US 20080031584A1
• Time in Patent Office: Days
• US Class Current: 385/132
• CPC Class Codes: G02B 2006/12069 Organic material
• CPC Class Codes: G02B 6/1221 made from organic materials
• CPC Class Codes: G02B 6/136 by etching
• CPC Class Codes: G02B 6/138 by using polymerisation

Abstract

Singulating polymer waveguides made on a substrate using photolithography. A first polymer cladding layer is formed and patterned on a first surface of a substrate to form a plurality of bottom cladding elements. Each of the bottom cladding elements are structurally independent from the other bottom cladding elements on the substrate. A second polymer layer is then formed and patterned on each of the bottom cladding elements to form a plurality of waveguide cores on each of the plurality of bottom cladding elements respectively. A third polymer top cladding layer is next formed over the plurality of waveguide cores on each of the bottom cladding elements respectively. In various embodiments, the individual waveguides can be separated from the substrate by using a selective tape or by cutting or sawing the substrate between the bottom cladding elements. The bottom cladding elements, the plurality of waveguide cores formed from the patterned second polymer layer, and the top cladding layer forming a plurality of polymer waveguides on the substrate.

Claims

1. A method, comprising;

forming a first polymer cladding layer on a first surface of a substrate;

patterning the first polymer layer to form a plurality of bottom cladding elements on the first surface of the substrate, each of the bottom cladding elements structurally independent from the other bottom cladding elements patterned on the first surface of the substrate;

forming and patterning a second polymer layer on each of the bottom cladding elements, the second polymer layer being patterned to form a plurality of waveguide cores on the plurality of bottom cladding elements respectively; and

forming a third polymer top cladding layer over the plurality of waveguide cores of the patterned second polymer layer on each of the bottom cladding elements respectively, the bottom cladding elements, plurality of waveguide cores formed from the patterned second polymer layer, and the top cladding layer forming a plurality of polymer waveguides on the substrate.

2. The method of claim 1, further comprising separating the plurality of bottom cladding elements from the substrate to singulate the plurality of polymer waveguides.

3. The method of claim 2, wherein separating the plurality of bottom cladding elements from the substrate further comprises pealing the plurality of bottom cladding elements from the substrate.

4. The method of claim 2, wherein the separating the plurality of bottom cladding elements from the substrate further comprises:

applying a tape to the plurality of polymer waveguides;

peeling the plurality of polymer waveguides from the substrate; and

releasing the plurality of polymer waveguides from the tape.

5. The method of claim 4, wherein the tape is a heat sensitive tape and releasing the plurality of polymer waveguides further comprises applying heat to the tape.

6. The method of claim 4, wherein the tape is a UV tape and releasing the plurality of polymer waveguides further comprises applying UV energy to the tape.

7. The method of claim 1, singulating the plurality of waveguides by cutting the substrate between the plurality of bottom cladding elements.

8. The method of claim 7, wherein the cutting the substrate further comprises cutting the substrate using a laser.

9. The method of claim 8, wherein the cutting the substrate further comprises cutting the substrate using a scribing machine.

10. The method of claim 1, wherein the substrate consists of one of the following types of materials:

mylar, polycarbonate, or PET.

11. The method of claim 1, wherein the first polymer layer and the third polymer layer have an index of refraction of N1.

12. The method of claim 11, wherein the second polymer layer has an index of refraction of N2.

13. The method of claim 12, wherein N2 is greater than N1.

14. The method of claim 1, wherein forming and patterning the second polymer layer further comprises patterning the second polymer layer to form a plurality of lenses optically coupled to the plurality of waveguides on the plurality of bottom cladding elements respectively.

15. The method of claim 14, wherein the patterning the second polymer layer further comprises patterning the plurality of lenses to be integrated with the plurality of waveguide cores on the plurality of bottom cladding elements respectively.

16. The method of claim 15, further comprising patterning the third polymer cladding layer so that a portion of the plurality of lenses are exposed to ambient air.

17. The method of claim 1, wherein the first polymer layer, the second polymer layer, and the third polymer layer consists of one or more of the following polymer materials:

optically clear photopolymers, polymers, epoxies, polysiloxanes, polymethylmethacrylates and other materials, or a combination thereof.

18. The method of claim 1, further comprising patterning the first polymer layer using semiconductor photolithography processes to form the plurality of bottom cladding elements on the first surface of the substrate.

25. The apparatus of claim 1, wherein the plurality of top cladding elements are patterned to expose to ambient air the lenses on each of the bottom cladding elements respectively.

19. An apparatus, comprising:

a substrate;

a plurality of bottom cladding elements structurally independent from one another and formed on the substrate;

a plurality of waveguide cores and lenses formed on each of the plurality of bottom cladding element; and

a plurality of top cladding elements formed over the plurality of waveguide cores on each of the bottom cladding elements respectively.

20. The apparatus of claim 19, wherein the substrate is peel-able so that plurality of bottom cladding elements can be peeled away from the substrate.

21. The apparatus of claim 19, wherein the plurality of bottom cladding elements and the plurality of top cladding elements are both made of polymer material having an index of refraction of N1.

22. The apparatus of claim 21, wherein the plurality of waveguide cores are made of a second polymer material having an index of refraction of N2, wherein N1 is less than N2.

23. The apparatus of claim 22, wherein the polymer material and the second polymer material consist of:

optically clear photopolymers, polymers, expoxies, polysiloxanes, polymethylethacrylates, or combination thereof.

24. The apparatus of claim 19, wherein the substrate consists of one of the following materials:

optically clear photopolymers, polymers, epoxies, polysiloxanes, polymethylmethacrylates and other materials, or a combination thereof.