VARIABLE LOT SIZE LOAD PORT

• US 20080031708A1
• Filed: 07/09/2007
• Published: 02/07/2008
• Est. Priority Date: 07/10/2006
• Status: Active Grant

• Current Assignee: Brooks Automation Ltd. (United Kingdom) (Azenta, Inc.)
• Original Assignee: Crossing Automation Incorporated (Azenta, Inc.)
• Inventors: Hine, Roger, Krolak, Michael, Bonora, Anthony, Rogers, Theodore
• Granted Patent: US 7,597,523 B2
• Time in Patent Office: Days
• US Class Current: 414/217
• CPC Class Codes: H01L 21/67772 involving removal of lid, door, cover
• CPC Class Codes: H01L 21/67775 Docking arrangements
• CPC Class Codes: Y10S 414/14 Wafer cassette transporting

Abstract

A variable lot size load port assembly includes a tool interface, an advance plate, and a seal plate. The tool interface extends generally in a vertical dimension and has a front surface, a back surface generally parallel to the front surface, and an aperture. An advance plate is positioned to the front of the tool interface below the aperture. The advance plate extends generally horizontally and is configured to support a front opening unified pod (FOUP). The advance plate translates between a retracted position and an advanced position. The advanced position is proximate the tool interface and the retracted position is spaced from the tool interface. The seal plate has an upper end secured to the tool interface and a lower end covering a portion of the aperture to form a reduced aperture. The seal plate is shaped to form a proximity seal with a front flange of a FOUP of a selected capacity mounted to the advance plate and brought to the advanced position.

Claims

1. A variable lot size load port assembly comprising:

a tool interface extending generally in a vertical dimension, the tool interface having a front surface facing a front of the tool interface, a back surface generally parallel to the front surface, and an aperture;

an advance plate positioned to the front of the tool interface below the aperture, the advance plate extending generally horizontally, and being configured to support a front opening unified pod (FOUP) and translate between a retracted position and an advanced position, the advanced position being proximate the tool interface and the retracted position being spaced from the tool interface;

a seal plate having an upper end secured to the tool interface and a lower end covering a portion of the aperture to form a reduced aperture, the seal plate being shaped to provide a proximity seal with a front flange of a FOUP of a selected capacity mounted to the advance plate and brought to the advanced position.

2. The variable lot size load port assembly of claim 1, wherein the seal plate is sized to correspond with the selected FOUP capacity and can be replaced by a different seal plate sized to correspond with FOUPs having a different capacity.

3. The variable lot size load port assembly of claim 1, wherein the tool interface includes a recessed shoulder formed into a left, right, and bottom edge of the aperture, and the seal plate has a recessed shoulder formed into a bottom edge of the seal plate, the recessed shoulders of the tool interface and the seal plate forming a continuous substantially flat shoulder formed on a plane parallel to the front surface of the tool interface and between the front surface and the back surface of the tool interface the continuous substantially flat shoulder being configured to establish a proximity seal with the front flange of the FOUP.

4. The variable lot size load port assembly of claim 3, wherein the port door is sized to fit within an aperture that is smaller than the reduced aperture formed by the tool interface and the seal plate, the port door further comprising an extension plate, the extension plate extending vertically up from the port door to at least partially occlude the reduced aperture when the port door is in the closed position.

5. The variable lot size load port assembly of claim 4, wherein the extension plate has a front surface formed of a perforated or porous material.

6. The variable lot size load port assembly of claim 5, wherein the port door further comprises a blower for blowing air through the front surface of the extension plate, the air exiting the front surface of the extension plate thereby preventing particulates from being deposited on the front surface of the extension plate.

7. The variable lot size load port assembly of claim 1, further comprising a port door, the port door being positionable in a closed position and an open position, wherein the port door in the closed position is positioned at least partially within the reduced aperture formed by the tool interface and the seal plate;

the port door having a front surface facing to the front of the tool interface, the port door having at least two latch keys extending from the front surface of the port door, the latch keys being configured to engage latch key receptacles of a FOUP door;

wherein the port door is mounted on a z-axis actuator that permits vertical positioning of the tool interface when in the closed position according to the selected FOUP capacity, the repositioning causing the latch keys to be in alignment with the latch key receptacles of the FOUP door of the selected capacity.

8. The variable lot size load port assembly of claim 1, wherein the tool interface includes a recessed surface above the aperture, the seal plate being mounted to the recessed surface.

9. The variable lot size load port assembly of claim 1 wherein the seal plate includes an adjustable mount to allow the seal plate to translate vertically and vary a vertical dimension of the reduced aperture, thereby accommodating FOUPS of differing capacities.

10. The variable lot size load port assembly of claim 9, wherein the tool interface includes a recessed shoulder formed into a left, right, and bottom edge of the aperture, and the seal plate has a recessed shoulder formed into a bottom edge of the seal plate, the recessed shoulders of the tool interface and the seal plate forming a continuous substantially flat shoulder formed on a plane parallel to the front surface of the tool interface and between the front surface and the back surface of the tool interface, the continuous substantially flat shoulder being configured to establish a proximity seal with the front flange of the FOUP.

11. The variable lot size load port assembly of claim 9, wherein the front flange of the FOUP extends in a vertical direction and has a front face facing the tool interface, the seal plate forming the proximity seal with the front flange by extending down and terminating just above a top edge of the front flange.

12. The variable lot size load port assembly of claim 1, wherein the selected FOUP capacity is one of a small capacity FOUP and a high capacity FOUP, the small capacity FOUP having a smaller FOUP door than the high capacity FOUP, the variable lot size load port assembly further comprising a port door, the port door being positionable in a closed position and an open position, wherein the port door, when in the closed position, is positioned at least partially within the reduced aperture formed by the tool interface and the seal plate;

the port door having a front surface facing to the front of the tool interface, the port door having at a first set of latch keys extendable from the front surface of the port door, the first set of latch keys being positioned to engage a corresponding set of latch key receptacles in the larger FOUP door, the port door further comprising a second set of latch keys extendable from the front surface of the port door, the second set of latch keys being positioned to engage a corresponding set of latch key receptacles in the smaller FOUP door, wherein one of the first and second sets of latch keys may be recessed within the port door while an other of the first and second sets of latch keys extends from the front surface of the port door.

13. The variable lot size load port assembly of claim 12, wherein each of the latch keys of the first set of latch keys are located on a first common line extending horizontally across the front of the port door, and each of the latch keys of the second set of latch keys are located on a second common line extending horizontally across the front of the port door, wherein the first common line is at an elevation corresponding to approximately half a height of the larger FOUP door, and the second common line is at an elevation corresponding to approximately half a height of the smaller FOUP door.

14. The variable lot size load port assembly of claim 1, wherein the selected FOUP capacity is one of a small capacity FOUP and a high capacity FOUP, the small capacity FOUP having a smaller FOUP door than the high capacity FOUP, the variable lot size load port assembly further comprising a port door, the port door being positionable in a closed position and an open position, wherein the port door, when in the closed position, is positioned at least partially within the reduced aperture formed by the tool interface and the seal plate;

the port door having a front surface facing to the front of the tool interface, the port door having a set of repositionable latch keys extendable from the front surface of the port door, the set of repositionable latch keys being positionable in a first configuration to engage a set of latch key receptacles in the larger FOUP door or positionable in a second configuration to engage a set of latch key receptacles in the smaller FOUP door.

15. The variable lot size load port assembly of claim 14, wherein, in the first configuration, each of the latch keys are located on a common line extending horizontally across the front of the port door, and in the second configuration, each of the latch keys are located on a second common line extending horizontally across the front of the port door, wherein the first common line is at an elevation corresponding to approximately half a height of the larger FOUP door, and the second common line is at an elevation corresponding to approximately half a height of the smaller FOUP door.

16. A variable lot size load port assembly comprising:

a tool interface extending generally in a vertical dimension, the tool interface having a front surface facing a front of the tool interface, a back surface generally parallel to the front surface, and an aperture;

a port door having a closed position wherein the port door at least partially occludes the aperture and an open position wherein the aperture is substantially unobstructed by the port door, the port door having a front surface facing to the front of the tool interface, the port door having at least two latch keys extending from the front surface of the port door, the latch keys being configured to engage latch key receptacles of a front opening unified pod (FOUP) door;

wherein the port door is mounted on a z-axis actuator that permits vertical positioning of the port door, the vertical positioning allowing the alignment of the latch keys with the latch key receptacles of FOUP doors of differing capacities when the port door is in the closed position, the FOUP doors of differing capacities having latch key receptacles of differing elevations.

17. The variable lot size load port assembly of claim 16, wherein the port door is sized to fit within an aperture that is smaller than the aperture, the variable lot size load port assembly further comprising an upper extension plate attached to the port door, the upper extension plate extending vertically up from the port door to substantially occlude an upper region of the aperture when the port door is in the closed position and a lower extension plate attached to the port door, the lower extension plate extending vertically down from the port door to substantially occlude a lower region of the aperture when the port door is in the closed position.

18. The variable lot size load port assembly of claim 16, wherein the port door is smaller than the aperture, the port door including are movably attached extension extending vertically up from the port door to substantially occlude an upper region of the aperture when the port door is in the closed position.

19. The variable lot size load port assembly of claim 18, wherein the extension has a front surface formed of a perforated or porous material, the port door further comprising a blower for blowing air through the front surface of the extension, thereby preventing particulates from being deposited on the front surface of the extension.

20. The variable lot size load port assembly of claim 18, further comprising:

an advance plate positioned to the front of the tool interface below the aperture, the advance plate extending generally horizontally, and being configured to support a FOUP and translate between a retracted position an advanced position, the advanced position being proximate the tool interface and the retracted position being spaced from the tool interface; and

a seal plate having an upper end secured to the tool interface and a lower end covering a portion of the aperture to form a reduced aperture, the seal plate being shaped to provide a proximity seal with a front flange of a FOUP of a selected capacity mounted to the advance plate and brought to the advanced position.

21. The variable lot size load port assembly of claim 20, wherein the seat plate is sized to correspond with the selected FOUP capacity and can be replaced by a different seal plate sized to correspond with FOUPs having a different capacity.