VARIABLE LOT SIZE LOAD PORT
First Claim
1. A variable lot size load port assembly comprising:
- a tool interface extending generally in a vertical dimension, the tool interface having a front surface facing a front of the tool interface, a back surface generally parallel to the front surface, and an aperture;
an advance plate positioned to the front of the tool interface below the aperture, the advance plate extending generally horizontally, and being configured to support a front opening unified pod (FOUP) and translate between a retracted position and an advanced position, the advanced position being proximate the tool interface and the retracted position being spaced from the tool interface;
a seal plate having an upper end secured to the tool interface and a lower end covering a portion of the aperture to form a reduced aperture, the seal plate being shaped to provide a proximity seal with a front flange of a FOUP of a selected capacity mounted to the advance plate and brought to the advanced position.
4 Assignments
0 Petitions
Accused Products
Abstract
A variable lot size load port assembly includes a tool interface, an advance plate, and a seal plate. The tool interface extends generally in a vertical dimension and has a front surface, a back surface generally parallel to the front surface, and an aperture. An advance plate is positioned to the front of the tool interface below the aperture. The advance plate extends generally horizontally and is configured to support a front opening unified pod (FOUP). The advance plate translates between a retracted position and an advanced position. The advanced position is proximate the tool interface and the retracted position is spaced from the tool interface. The seal plate has an upper end secured to the tool interface and a lower end covering a portion of the aperture to form a reduced aperture. The seal plate is shaped to form a proximity seal with a front flange of a FOUP of a selected capacity mounted to the advance plate and brought to the advanced position.
-
Citations
21 Claims
-
1. A variable lot size load port assembly comprising:
-
a tool interface extending generally in a vertical dimension, the tool interface having a front surface facing a front of the tool interface, a back surface generally parallel to the front surface, and an aperture;
an advance plate positioned to the front of the tool interface below the aperture, the advance plate extending generally horizontally, and being configured to support a front opening unified pod (FOUP) and translate between a retracted position and an advanced position, the advanced position being proximate the tool interface and the retracted position being spaced from the tool interface;
a seal plate having an upper end secured to the tool interface and a lower end covering a portion of the aperture to form a reduced aperture, the seal plate being shaped to provide a proximity seal with a front flange of a FOUP of a selected capacity mounted to the advance plate and brought to the advanced position. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
-
-
16. A variable lot size load port assembly comprising:
-
a tool interface extending generally in a vertical dimension, the tool interface having a front surface facing a front of the tool interface, a back surface generally parallel to the front surface, and an aperture;
a port door having a closed position wherein the port door at least partially occludes the aperture and an open position wherein the aperture is substantially unobstructed by the port door, the port door having a front surface facing to the front of the tool interface, the port door having at least two latch keys extending from the front surface of the port door, the latch keys being configured to engage latch key receptacles of a front opening unified pod (FOUP) door;
wherein the port door is mounted on a z-axis actuator that permits vertical positioning of the port door, the vertical positioning allowing the alignment of the latch keys with the latch key receptacles of FOUP doors of differing capacities when the port door is in the closed position, the FOUP doors of differing capacities having latch key receptacles of differing elevations. - View Dependent Claims (17, 18, 19, 20, 21)
-
Specification