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VARIABLE LOT SIZE LOAD PORT

  • US 20080031708A1
  • Filed: 07/09/2007
  • Published: 02/07/2008
  • Est. Priority Date: 07/10/2006
  • Status: Active Grant
First Claim
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1. A variable lot size load port assembly comprising:

  • a tool interface extending generally in a vertical dimension, the tool interface having a front surface facing a front of the tool interface, a back surface generally parallel to the front surface, and an aperture;

    an advance plate positioned to the front of the tool interface below the aperture, the advance plate extending generally horizontally, and being configured to support a front opening unified pod (FOUP) and translate between a retracted position and an advanced position, the advanced position being proximate the tool interface and the retracted position being spaced from the tool interface;

    a seal plate having an upper end secured to the tool interface and a lower end covering a portion of the aperture to form a reduced aperture, the seal plate being shaped to provide a proximity seal with a front flange of a FOUP of a selected capacity mounted to the advance plate and brought to the advanced position.

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