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Device and Method for Inspecting for Flaw on Surface of Work

  • US 20080033664A1
  • Filed: 08/25/2005
  • Published: 02/07/2008
  • Est. Priority Date: 09/03/2004
  • Status: Active Grant
First Claim
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1. A flaw inspection device which inspects for presence of a flaw on a surface of a workpiece, comprising:

  • a surface position measurement means which, while rotating said workpiece around a predetermined rotational axis, measures a surface position of an inspection region of said workpiece in a direction perpendicular to said rotational axis, for each of rotational angles;

    a surface waveform acquisition means which receives an output signal of said surface position measurement means, and acquires surface waveform data which specifies said surface position with respect to each of the rotational angles;

    a high frequency waveform extraction means which extracts, from said surface waveform data, high frequency waveform data which has a frequency higher than a predetermined frequency, or high frequency waveform data which specifies a change of a position within an angular range smaller than a predetermined angle; and

    a flaw decision means which decides upon the presence of the flaw at said inspection region, based upon said high frequency waveform data which has been extracted.

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