MULTI-RANGE THREE-AXIS ACCELERATION SENSOR DEVICE
First Claim
1. A multi-range three-axis acceleration sensor device comprising a plurality of three-axis acceleration sensor elements formed in a single silicon chip,each of the plurality of three-axis acceleration sensor elements comprising a weight,a frame surrounding the weight and having frame sides opposite to each other,flexible members thinner than the weight and the frame, which members connect upper portions of the opposite frame sides with an upper portion of the weight to support the weight between the upper portions of the opposite frame sides, andpiezo resistors disposed on an upper surface of the flexible members to measure accelerations in two orthogonal axis directions in the upper surface of the flexible members and acceleration in a direction vertical to the upper surface of the flexile members,wherein the plurality of three-axis acceleration sensor elements include a first three-axis acceleration sensor element, in the frame of which other three-axis acceleration sensor elements are provided,each of the plurality of three-axis acceleration sensor elements causes output voltage for unit acceleration different from another, andthe output voltage for unit acceleration from the first three-axis acceleration sensor element is larger than output voltage for unit acceleration from another.
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Accused Products
Abstract
Disclosed is a multi-range three-axis acceleration sensor device in which a plurality of three-axis acceleration sensor elements are formed without axial deviation among them in a single silicon chip and have different acceleration measurement ranges. Each of the plurality of sensor elements includes a weight, a frame surrounding the weight and flexible members composed of beams or diaphragm connecting the weight with the frame. Each of the plurality of sensor elements causes different output voltage for unit acceleration from another. A first three-axis acceleration sensor element among the plurality of sensor elements has other sensor elements of them formed in a frame of the first one and causes a larger output voltage for unit acceleration than the others.
28 Citations
16 Claims
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1. A multi-range three-axis acceleration sensor device comprising a plurality of three-axis acceleration sensor elements formed in a single silicon chip,
each of the plurality of three-axis acceleration sensor elements comprising a weight, a frame surrounding the weight and having frame sides opposite to each other, flexible members thinner than the weight and the frame, which members connect upper portions of the opposite frame sides with an upper portion of the weight to support the weight between the upper portions of the opposite frame sides, and piezo resistors disposed on an upper surface of the flexible members to measure accelerations in two orthogonal axis directions in the upper surface of the flexible members and acceleration in a direction vertical to the upper surface of the flexile members, wherein the plurality of three-axis acceleration sensor elements include a first three-axis acceleration sensor element, in the frame of which other three-axis acceleration sensor elements are provided, each of the plurality of three-axis acceleration sensor elements causes output voltage for unit acceleration different from another, and the output voltage for unit acceleration from the first three-axis acceleration sensor element is larger than output voltage for unit acceleration from another.
Specification