MONITORING SYSTEM FOR VALVE DEVICE
First Claim
Patent Images
1. A monitoring system for valve device, comprising:
- a semiconductor single crystalline substrate including a bridged circuit, and the bridged circuit comprising impurity-diffused resistors;
wherein;
the semiconductor single crystalline substrate is mounted to a valve stem of the valve device.
1 Assignment
0 Petitions
Accused Products
Abstract
A monitoring system for valve device according to the present invention comprises a semiconductor single crystalline substrate including a bridged circuit and the bridged circuit comprising impurity-diffused resistors. The semiconductor single crystalline substrate is mounted to any of a valve device'"'"'s valve stem, valve yoke, drive shaft, or elastic body disposed at the end of the drive shaft. Thrust and torque of the valve device are measured by the semiconductor single crystalline substrate and then the measured values are used for monitoring the valve device.
-
Citations
57 Claims
-
1. A monitoring system for valve device, comprising:
-
a semiconductor single crystalline substrate including a bridged circuit, and the bridged circuit comprising impurity-diffused resistors;
wherein;
the semiconductor single crystalline substrate is mounted to a valve stem of the valve device. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 20, 21, 22, 55)
-
-
9. A monitoring system for valve device, comprising:
-
a semiconductor single crystalline substrate including a bridged circuit, and the bridged circuit comprising impurity-diffused resistors; and
a valve device comprising a valve stem, a drive unit which generates a drive force, a drive shaft which transmits the drive force of the drive unit, and a gear which transmits rotation of the drive shaft to the valve stem; and
wherein;
the semiconductor single crystalline substrate is disposed on the drive shaft of the valve device. - View Dependent Claims (10, 11, 49, 51, 53, 56)
-
-
12. A monitoring system for valve device, comprising:
-
a semiconductor single crystalline substrate including a bridged circuit, and the bridged circuit comprising impurity-diffused resistors; and
a valve device comprising a valve stem, a drive unit which generates a drive force, a drive shaft which transmits the drive force of the drive unit, a gear which transmits rotation of the drive shaft to the valve stem, an elastic body disposed at the end of the drive shaft in the axial direction; and
wherein;
the semiconductor single crystalline substrate is disposed on the elastic body of the valve device. - View Dependent Claims (13, 14, 15, 16)
-
-
17. A monitoring system for valve device, comprising:
-
a semiconductor single crystalline substrate including a bridged circuit, and the bridged circuit comprising impurity-diffused resistors;
wherein;
the semiconductor single crystalline substrate is mounted to a valve yoke of a valve device with a valve stem. - View Dependent Claims (18, 19, 50, 52, 54, 57)
-
-
23. A monitoring system for valve device, comprising:
-
the valve device including a valve stem and a valve yoke, a semiconductor single crystalline substrate mounted to the valve stem or the valve yoke, and a set of impurity-diffused resistors configured in the semiconductor single crystalline substrate;
wherein;
the set of impurity-diffused resistors comprises a bridged circuit, and longitudinal directions of the set of impurity-diffused resistors are parallel or perpendicular to an axial direction of the valve stem. - View Dependent Claims (24, 25, 29, 30, 31)
-
-
26. A monitoring system for valve device, comprising:
-
the valve device including a valve stem and a valve yoke, a semiconductor single crystalline substrate mounted to the valve stem or the valve yoke, and a set of impurity-diffused resistors configured in the semiconductor single crystalline substrate;
wherein;
the set of impurity-diffused resistors comprises a bridged circuit, and longitudinal directions of the set of impurity-diffused resistors are at an angle of 45 degrees to an axial direction of the valve stem. - View Dependent Claims (27, 28, 32, 33)
-
-
34. A monitoring system for valve device, comprising:
-
a semiconductor single crystalline substrate including a bridged circuit, the bridged circuit comprising impurity-diffused resistors, and a controlling and transmitting unit;
wherein;
the semiconductor single crystalline substrate and the controlling and transmitting unit are mounted to a valve device; and
the semiconductor single crystalline substrate and the controlling and transmitting unit detect open or close condition of the valve device and transmit data of the condition. - View Dependent Claims (35, 36, 37, 38, 39, 40, 41, 42, 43)
-
-
44. A monitoring system for valve device, comprising:
-
a semiconductor single crystalline substrate including a bridged circuit, the bridged circuit comprising impurity-diffused resistors, a controlling and transmitting unit, and an alarm device built in or connected to the controlling and transmitting unit;
wherein;
the semiconductor single crystalline substrate and the controlling and transmitting unit are mounted to a valve device;
the semiconductor single crystalline substrate and the controlling and transmitting unit detect open or close condition of the valve device and transmit data of the condition; and
the alarm device informs the condition of the valve device. - View Dependent Claims (45, 46, 47, 48)
-
Specification