SEMICONDUCTOR TRANSFER SYSTEM AND VEHICLE CONTROL METHOD THEREOF
First Claim
1. A semiconductor transfer system comprising:
- a rail to interconnect a plurality of sections, for which a range of the number of vehicles is set, to provide a route, along which the vehicles move in the respective sections or between the sections; and
a vehicle controller to determine whether the number of vehicles is maintained in the set range in the sections during movement of the vehicle, and, when the number of vehicles deviates from the set range in at least one of the sections, to control the movement of the vehicles such that the number of vehicles is maintained in the set range in the at least one of the sections.
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Accused Products
Abstract
A semiconductor transfer system, adopting a cell-integration rail-type article transfer structure, which is capable of systematically and effectively preventing the concentration or the shortage of the vehicles in specific sections, which may occur during the normal transfer of articles, and a vehicle control method thereof. The semiconductor transfer system is constructed in a cell-integration structure having a rail and a plurality of vehicles moving along the rail to transfer articles, in which the rail is divided into a plurality of sections, and a range of the number of vehicles moving in the respective sections is set. Whenever the number of vehicles deviates from the set range, unloaded vehicles are moved from the sections where the number of vehicles is greater than the set range to the relay section, or unloaded vehicles are moved from the relay section to the sections where the number of vehicles is less than the set range. Consequently, it is possible to effectively prevent the concentration or the shortage of the vehicles in specific sections.
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Citations
21 Claims
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1. A semiconductor transfer system comprising:
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a rail to interconnect a plurality of sections, for which a range of the number of vehicles is set, to provide a route, along which the vehicles move in the respective sections or between the sections; and a vehicle controller to determine whether the number of vehicles is maintained in the set range in the sections during movement of the vehicle, and, when the number of vehicles deviates from the set range in at least one of the sections, to control the movement of the vehicles such that the number of vehicles is maintained in the set range in the at least one of the sections. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A vehicle control method of a semiconductor transfer system, comprising:
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moving a plurality of vehicles along a rail interconnecting a plurality of sections, for which a range of the number of vehicles is set, to provide a route, along which the vehicles move in the respective sections or between the respective sections, determining whether the number of vehicles is maintained within the set range in the respective sections; and if the number of vehicles deviates from the set range in at least one of the sections, moving the vehicles such that the number of vehicles is maintained in the set range in the at least one of the sections. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21)
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Specification