Apparatus for Manufacturing Biochip and Method for Manufacturing Biochip Tip Array Module
First Claim
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1. An apparatus for manufacturing a biochip from a substrate, comprising:
- a tip;
a reservoir tank; and
a conduit connecting the tip and the reservoir tank, when the substrate is paced over the tip, an agent in the reservoir tank can be applied to the substrate by moving upward and downward the reservoir tank with respect to the tip array.
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Abstract
An apparatus of manufacturing a biochip and manufacture method of biochip tip array. The invention provides an apparatus for manufacturing a biochip from a substrate. The apparatus comprises a tip array, a reservoir tank and a conduit connecting the tip array and the reservoir tank. When the substrate is placed over the tip array, the agent in the reservoir tank can be applied to the substrate by moving upward and downward the reservoir tank with respect to the tip array.
13 Citations
25 Claims
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1. An apparatus for manufacturing a biochip from a substrate, comprising:
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a tip; a reservoir tank; and a conduit connecting the tip and the reservoir tank, when the substrate is paced over the tip, an agent in the reservoir tank can be applied to the substrate by moving upward and downward the reservoir tank with respect to the tip array. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. An apparatus of manufacturing a biochip from a substrate, comprising:
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a tip array; a reservoir tank for storing an agent; a conduit connecting the tip and the reservoir tan; and a pressure controller connecting to and controlling the pressure of the reservoir. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. A method for manufacturing a biochip tip array module, comprising:
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providing a substrate; forming a photoresist layer on the substrate; subjecting a first exposure to the photoresist layer with a first photo-mask; subjecting a second exposure to the photoresist layer with a second photo-mask; developing the substrate to form a photoresist pattern thereon, wherein the photoresist pattern has a plurality of photoresist pillars arranged in an array; forming a metal layer on the substrate outside the photoresist pillars to form a metal structure; and removing the photoresist pillars and the substrate to leave the metal structure to form a tip array module, wherein the tip array module comprises a plurality of tips arranged in an array. - View Dependent Claims (23, 24, 25)
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Specification