SURFACE PROCESSING APPARATUS

• US 20080035608A1
• Filed: 08/08/2007
• Published: 02/14/2008
• Est. Priority Date: 08/14/2006
• Status: Abandoned Application

• Current Assignee: Oxford Instruments Nanotechnology Tools Limited (Oxford Instruments PLC)
• Original Assignee: Oxford Instruments Nanotechnology Tools Limited (Oxford Instruments PLC)
• Inventors: Griffiths, Andrew, Cooke, Michael, THOMAS, Owain
• Application Number:
  US11/835,618
• Publication Number:
  US 20080035608A1
• Time in Patent Office: Days
• US Class Current: 216/67
• CPC Class Codes: C23C 16/452 by activating reactive gas streams before their introduction into the reaction chamber, e.g. by ionisation or addition of reactive species
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: H01J 37/321 the radio frequency energy being inductively coupled to the plasma
• CPC Class Codes: H01J 37/32357 Generation remote from the workpiece, e.g. down-stream
• CPC Class Codes: H01J 37/32623 Mechanical discharge control means

Abstract

A surface processing apparatus is provided for use in the surface processing of a substrate. The surface processing apparatus comprises a plasma source and processing chamber in which a substrate is mounted in use. The processing chamber is operatively connected to the plasma source and the surface processing apparatus is characterised by a transmission plate for the transmission of plasma in use between the plasma source and processing chamber. The transmission plate comprises one or more apertures wherein the physical form of the one or more apertures and/or the distribution of the one or more apertures is adapted to provide a predetermined processing pattern upon the surface of the substrate. Typically the design of the apertures is adapted to provide a substantially uniform deposition rate across a wafer substrate.

Claims

1. A surface processing apparatus for use in the surface processing of a substrate,

the surface processing apparatus comprising:

a plasma source; and

a processing chamber in which a substrate is mounted in use, the processing chamber being operatively connected to the plasma source;

the surface processing apparatus characterised by;

a transmission plate for the transmission of plasma in use between the plasma source and processing chamber, the transmission plate comprising one or more apertures wherein the physical form of the one or more apertures and/or the distribution of the one or more apertures is adapted to provide a predetermined processing pattern upon the surface of the substrate.

2. The surface processing apparatus of claim 1, wherein the transmission plate comprises a plurality of circular apertures.

3. The surface processing apparatus of claim 2, wherein the diameter of each circular aperture is greater than the thickness of the transmission plate.

4. The surface processing apparatus of claim 3, wherein the ratio of aperture diameter to transmission plate thickness is greater than 3:

1.

5. The surface processing apparatus of claim 2, wherein the diameter of each circular aperture is greater than 5 mm.

6. The surface processing apparatus of claim 5, wherein the diameter of each circular aperture is greater than 9 mm.

7. The surface processing apparatus of claim 1, wherein the transmission plate is circular in form.

8. The surface processing apparatus of claim 7, wherein a plurality of apertures are distributed in one or more concentric aperture rings upon the transmission plate, the centre(s) of the one or more concentric aperture rings being that of the transmission plate.

9. The surface processing apparatus of claim 8, wherein the concentric spacing of the plurality of apertures within each concentric aperture ring is adapted to provide a predetermined processing pattern upon the surface of the substrate.

10. The surface processing apparatus of claim 8, wherein a plurality of concentric aperture rings are arranged upon the transmission plate and the radial spacing between each pair of concentric aperture rings is adapted to provide a predetermined processing pattern upon the surface of the substrate.

11. The surface processing apparatus of claim 1, wherein the plasma source is an inductively coupled plasma.

12. The surface processing apparatus of claim 11, wherein the plasma source comprises a plasma chamber and an inductively coupled coil.

13. The surface processing apparatus of claim 12, wherein the inductively coupled coil is connected to a radio frequency (RF) source.

14. The surface processing apparatus of claim 13, wherein the RF source supplies an RF current at 13.56 MHz.

15. The surface processing apparatus of claim 1, further comprising a first gas supply to the plasma source and a second gas supply to the processing chamber.

16. The surface processing apparatus of claim 1, wherein the surface processing of the substrate comprises the deposition of material on the surface of the substrate.

17. The surface processing apparatus of claim 16, wherein the physical form of the one or more apertures and/or the distribution of the one or more apertures is adapted to provide a substantially uniform deposition rate across a width of the substrate.

18. The surface processing apparatus of claim 1, wherein the surface processing of the substrate comprises the removal of material from the surface of the substrate.

19. The surface processing apparatus of claim 18, wherein the physical form of the one or more apertures and/or the distribution of the one or more apertures is adapted to provide a substantially uniform material removal rate across a width of the substrate.

20. The surface processing apparatus of claim 1, wherein the thermal conductivity of the transmission plate is greater than 100 W m⁻

1 K<sup>−

1</sup>.

21. The surface processing apparatus of claim 1, wherein the transmission plate is thermally connected to the processing chamber via a low thermal resistance path.

22. The surface processing apparatus of claim 1, wherein the transmission plate comprises a metal or metal alloy plate.

23. The surface processing apparatus of claim 22, wherein the transmission plate comprises a metal or metal alloy plate coated with a layer resistant to attack by the plasma.

24. The surface processing apparatus of claim 1, wherein the transmission plate comprises a ceramic plate.

25. The surface processing apparatus of claim 24, wherein the transmission plate comprises an alumina plate.

26. The surface processing apparatus of claim 12, wherein the plasma chamber and the processing chamber comprise substantially cylindrical chambers.

27. The surface processing apparatus of claim 26, wherein the plasma chamber and processing chamber are axially aligned.

28. The surface processing apparatus of claim 1, wherein the plasma source is mounted above the processing chamber.

29. A method for the fabrication of a transmission plate for use in the surface processing of a substrate mounted within a processing chamber, the transmission plate being mounted in use between a plasma source and the processing chamber and comprising one or more apertures to allow the transmission of plasma from the plasma source to the processing chamber, the method comprising the steps of:

a) measuring the processing rate of a surface process on the substrate with respect to the radius of the substrate, r, using the plasma source and the processing chamber without a transmission plate;

b) fitting a process rate function d(r) to the measured process rate;

c) calculating a plasma transmission function T(r) as a function of the radius from a centre of the transmission plate, such that d(r)×

T(r) is a constant;

d) defining an aperture design for the physical form of the one or more apertures and/or the distribution of the one or more apertures such that a measured plasma transmission function for the transmission plate provides a best fit to the plasma transmission function T(r); and

e) fabricating a transmission plate using the aperture design defined in step d).

30. The method of claim 29, wherein the apertures defined in d) have a predetermined width to thickness ratio.

31. A method of operating a surface processing apparatus, the surface processing apparatus comprising:

a plasma source; and

a processing chamber in which a substrate is mounted in use, the processing chamber being operatively connected to the plasma source;

the surface processing apparatus characterised by a transmission plate for the transmission of plasma in use between the plasma source and processing chamber, the transmission plate comprising one or more apertures wherein the physical form of the one or more apertures and/or the distribution of the one or more apertures is adapted to provide a predetermined processing pattern upon the surface of the substrate;

the method comprising;

a) injecting a first gas or gas mixture into the plasma source on one side of the transmission plate;

b) injecting a second gas or gas mixture into the processing chamber of the other side of the transmission plate;

c) adjusting the gas flow ratio of the two injected gases in response to a measured processing rate.

32. The method of claim 31, wherein the first and second mixtures gases include noble gases.

33. The method of claim 32, wherein the first and second gases are the same noble gas.

34. The method of claim 31, wherein the temperature of the transmission plate is kept within 20 degrees Celsius of the temperature of an external chamber.