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SURFACE PROCESSING APPARATUS

  • US 20080035608A1
  • Filed: 08/08/2007
  • Published: 02/14/2008
  • Est. Priority Date: 08/14/2006
  • Status: Abandoned Application
First Claim
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1. A surface processing apparatus for use in the surface processing of a substrate, the surface processing apparatus comprising:

  • a plasma source; and

    a processing chamber in which a substrate is mounted in use, the processing chamber being operatively connected to the plasma source;

    the surface processing apparatus characterised by;

    a transmission plate for the transmission of plasma in use between the plasma source and processing chamber, the transmission plate comprising one or more apertures wherein the physical form of the one or more apertures and/or the distribution of the one or more apertures is adapted to provide a predetermined processing pattern upon the surface of the substrate.

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