MICROFLUIDIC VALVE HAVING FREE-FLOATING MEMBER AND METHOD OF FABRICATION
First Claim
1. A micro check valve for controlling flow of a liquid, comprising:
- a valve seat comprised of a substrate material;
a valve cap disposed on the valve seat, a space being defined between the valve seat and the valve cap; and
a floating member movable in the space between the valve seat and the valve cap by application of pressure on the floating member by the liquid to passively control flow of the liquid through the valve seat and the valve cap.
2 Assignments
0 Petitions
Accused Products
Abstract
Micro check valves having a free-floating member for controlling flow of fluid in microfluidic and biomedical applications and methods of fabrication. A micro check valve includes a valve seat, a valve cap that contacts the valve seat and an untethered floating member that can move between the valve seat and the valve cap. Certain micro check valves have zero cracking pressure and no reverse leakage. Certain other valves may be configured to permit flow of fluid within a pressure range. The floating member can be solid or define an orifice, and the valve seat can have one or two levels. Valves can be configured to allow fluid to flow when the floating member is pushed by fluid against the valve cap or against the valve seat. The valve seat may be silicon or another material that is compatible with micromachining processes, and the valve cap and the floating member may be a polymer such as Parylene.
38 Citations
20 Claims
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1. A micro check valve for controlling flow of a liquid, comprising:
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a valve seat comprised of a substrate material;
a valve cap disposed on the valve seat, a space being defined between the valve seat and the valve cap; and
a floating member movable in the space between the valve seat and the valve cap by application of pressure on the floating member by the liquid to passively control flow of the liquid through the valve seat and the valve cap. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A micro check valve for controlling flow of a fluid, comprising:
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a multi-level valve seat comprised of a substrate material, the multi-level valve seat having a first surface at a first level and a second surface at a second, lower level;
a valve cap disposed on the first surface, a space being defined between the valve seat and the valve cap; and
a floating member movable in the space between the multi-level valve seat and the valve cap by application of pressure on the floating member by a fluid to passively control flow of the fluid through the multi-level valve seat and the valve cap. - View Dependent Claims (15, 16, 17, 18, 19)
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20. A method of fabricating a micro check valve having a floating member for controlling flow of fluid, the method comprising:
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depositing a plurality of polymer layers and a plurality of sacrificial layers on a substrate in an alternating manner, the substrate comprising a valve seat, the plurality of polymer layers including a first polymer layer comprising the floating member, a second polymer layer comprising a valve cap, and a third polymer layer comprising an outer wall defining a fluid channel;
removing the plurality of sacrificial layers, thereby forming an in-channel microfluidic valve having a floating polymer member that is movable between the valve seat and the polymer valve cap.
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Specification