Sensor Having Switch Function, Manufacturing Method Thereof and Electronic Device Having Sensor Built Therein
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Accused Products
Abstract
There are provided a sensor which is small, suitable for reflow soldering by automatic cleaning and automatic mounting, can be manufactured in batch, and has a switch function, and a manufacturing method of the sensor, and a portable telephone having the sensor built therein. There are provided a sensor having a switch function, the sensor being composed of a first substrate composed of a semiconductor by which a conducting part of the switch is formed, a second substrate composed of the semiconductor by which a conducting part of the switch is formed or an insulator by which the conducting part of the switch is formed, and a moving member having conductivity, wherein any of the first substrate and the second substrate has a cavity-shaped portion and the moving member having conductivity is confined by the first substrate and the second substrate, and a manufacturing method of the sensor, and an electronic device having the sensor built therein.
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Citations
26 Claims
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1-13. -13. (canceled)
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14. A sensor having a switch function manufactured by using a semiconductor integrated circuit technology, comprising:
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a first substrate made from a semiconductor material on which a conducting part of the switch is formed;
a second substrate made from a semiconductor material or an insulating material on which a conducting part of the switch is formed; and
a moving member made from a conducting material;
whereineither the first or the second substrate has a cavity-shaped portion on a surface of which the conducting part is formed;
the conducting part of either the first or the second substrate forms a flat surface electrode; and
the moving member is movably held between the first and the second substrate. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
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Specification