METHOD AND DEVICE FOR MULTI-COLOR INTERFEROMETRIC MODULATION
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Abstract
Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. Each deformable element has a deformation mechanism and an optical portion, the deformation mechanism and the optical portion independently imparting to the element respectively a controlled deformation characteristic and a controlled modulation characteristic. The deformable modulation element may be a non-metal. The elements are made by forming a sandwich of two layers and a sacrificial layer between them, the sacrificial layer having a thickness related to the final cavity dimension, and using water or an oxygen based plasma to remove the sacrificial layer.
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Citations
55 Claims
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1-53. -53. (canceled)
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54. An array of light modulators, comprising:
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at least three modulators arranged so as to form one resulting picture element;
each modulator comprising a mirror suspended over a cavity by supports, the supports formed such that each modulator corresponding to each color assumes a quiescent state corresponding to a cavity with a different dimension.
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55. An array of light modulators, comprising:
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a first modulator, said first modulator comprising a reflective element suspended over a first cavity by supports, wherein the first modulator assumes a quiescent state corresponding to a first color;
a second modulator, said first modulator comprising a reflective element suspended over a second cavity by supports, wherein the supports are formed such that the second modulator assumes a quiescent state corresponding to a second color; and
a third modulator, said third modulator comprising a reflective element suspended over a third cavity by supports, wherein the supports are formed such that the third modulator assumes a quiescent state corresponding to a third color.
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Specification