Dielectric actuator or sensor structure and method of making it
First Claim
1. A method of making a dielectric actuator/sensor structure comprising steps of:
- forming a first elastomeric sheet with substantially opposed first and second surfaces;
forming a second elastomeric sheet with substantially opposed first and second surfaces;
applying a first electrode to the second surface of the first elastomeric sheet;
applying a second electrode to the second surface of the second elastomeric sheet; and
connecting the first surfaces of the first and second elastomeric sheets.
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Abstract
The present invention relates to dielectric actuators or sensors of the kind wherein electrostatic attraction between two electrodes located on an elastomeric body leads to a compression of the body in a first direction and a corresponding extension of the body in a second direction. The dielectric actuator/sensor structure comprises a first sheet of elastomeric material having at least one smooth surface and a second surface and a second sheet of elastomeric material having at least one smooth surface and a second surface. The sheets are laminated together with their second surfaces exposed, and there is provided a first electrode on the second surface of the first sheet and second electrode on the second surface of the second sheet.
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Citations
31 Claims
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1. A method of making a dielectric actuator/sensor structure comprising steps of:
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forming a first elastomeric sheet with substantially opposed first and second surfaces;
forming a second elastomeric sheet with substantially opposed first and second surfaces;
applying a first electrode to the second surface of the first elastomeric sheet;
applying a second electrode to the second surface of the second elastomeric sheet; and
connecting the first surfaces of the first and second elastomeric sheets. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. A method of making a dielectric actuator/sensor structure comprising steps of:
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aligning first and second elastomeric sheets, each elastomeric sheet having a first surface and a substantially opposed micro-corrugated second surface, such that the first surfaces are facing each other and corrugations of the micro-corrugated second surfaces are substantially parallel; and
laminating the first and second elastomeric sheets together on their respective first surfaces. - View Dependent Claims (24, 25, 26)
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27. A method of making a dielectric actuator/sensor structure comprising steps of:
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molding a first elastomeric sheet with a first surface and a second surface;
molding a second elastomeric sheet with a first surface and a second surface; and
connecting first surfaces of the first and second elastomeric sheets;
wherein the second surface of at least one of the first and second elastomeric sheets is formed with micro-corrugations. - View Dependent Claims (28, 29, 30, 31)
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Specification