METHODS FOR ETCHING DOPED OXIDES IN THE MANUFACTURE OF MICROFEATURE DEVICES
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Abstract
Methods for selectively etching doped oxides in the manufacture of microfeature devices are disclosed herein. An embodiment of one such method for etching material on a microfeature workpiece includes providing a microfeature workpiece including a doped oxide layer and a nitride layer adjacent to the doped oxide layer. The method include selectively etching the doped oxide layer with an etchant comprising DI:HF and an acid to provide a pH of the etchant such that the etchant includes (a) a selectivity of phosphosilicate glass (PSG) to nitride of greater than 250:1, and (b) an etch rate through PSG of greater than 9,000 Å/minute.
28 Citations
56 Claims
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1-44. -44. (canceled)
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45. A method for forming capacitors on a microfeature workpiece, the workpiece including a plurality of conductive plugs, a first nitride layer over the conductive plugs, a dielectric layer over the first nitride layer, and a second nitride layer over the dielectric layer, the method comprising:
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patterning and etching the second nitride layer to form a mask over the dielectric layer;
forming a plurality of openings in the dielectric layer, the individual openings exposing at least a portion of an individual conductive plugs, wherein the dielectric layer includes a doped oxide material;
depositing a first conductive layer in at least a portion of the individual openings and in electrical contact with corresponding conductive plugs, wherein the first conductive layer includes TiN;
depositing a second conductive layer over at least a portion of the first conductive layer in the individual openings, wherein the second conductive layer includes polysilicon; and
removing at least substantially all the dielectric layer from the workpiece with an etchant comprising DI;
HF and an acid to provide a pH of the etchant such that the etchant includes (a) a selectivity of phosphosilicate glass (PSG) to nitride of greater than 250;
1, and (b) an etch rate through PSG of greater than 9,000 Å
/minute. - View Dependent Claims (46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56)
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Specification