REATAINING RING AND ARTICLES FOR CARRIER HEAD

• US 20080039000A1
• Filed: 08/02/2007
• Published: 02/14/2008
• Est. Priority Date: 09/08/2000
• Status: Abandoned Application

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Chen, Hung, Bennett, Doyle, Nagengast, Andrew
• Application Number:
  US11/832,801
• Publication Number:
  US 20080039000A1
• Time in Patent Office: Days
• US Class Current: 451/363
• CPC Class Codes: B24B 37/30 for single side lapping of plane surfaces
• CPC Class Codes: B24B 37/32 Retaining rings

Abstract

A carrier head for chemical mechanical polishing that has a base, a mounting assembly connected to the base having a surface for contacting a substrate, and a retaining ring secured to the base. The retaining ring can include perfluoroalkoxy, polyetherketoneketone, polybenzimidazole, a semi-crystalline thermoplastic polyester, or a long molecular chain molecule produced from poly-paraphenylene terephthalamide.

Claims

1. A retaining ring for a chemical mechanical polishing head, comprising:

an upper portion configured to be secured to a base; and

a lower portion that includes a material selected from the group consisting of perfluoroalkoxy, polyetherketoneketone, polybenzimidazole, a semi-crystalline thermoplastic polyester, and a long molecular chain molecule produced from poly-paraphenylene terephthalamide.

2. The retaining ring of claim 1, wherein the bottom portion includes perfluoroalkoxy.

3. The retaining ring of claim 1, wherein the bottom portion includes polyetherketoneketone.

4. The retaining ring of claim 1, wherein the bottom portion includes polybenzimidazole.

5. The retaining ring of claim 1, wherein the bottom portion includes a semi-crystalline thermoplastic polyester.

6. The retaining ring of claim 1, wherein the bottom portion includes a long molecular chain molecule produced from poly-paraphenylene terephthalamide.

7. The retaining ring of claim 1, wherein the bottom portion further includes at least one of graphite or carbon fibers.

8. The retaining ring of claim 1, wherein the upper portion is more rigid than the lower portion.

9. The retaining ring of claim 1, wherein the upper portion comprises stainless steel or aluminum.

10. The retaining ring of claim 1, wherein the upper portion and the lower portion are formed of the same material.

11. A carrier head for chemical mechanical polishing, comprising:

a base;

a mounting assembly attached to the base having a surface for contacting a substrate; and

a retainer secured to the base to prevent the substrate from moving along the surface, at least a bottom portion of the retainer including a material selected from the group consisting of perfluoroalkoxy, polyetherketoneketone, polybenzimidazole, a semi-crystalline thermoplastic polyester, and a long molecular chain molecule produced from poly-paraphenylene terephthalamide.

12. The carrier head of claim 11, wherein at least a bottom portion of the retainer includes perfluoroalkoxy.

13. The carrier head of claim 11, wherein at least a bottom portion of the retainer includes polyetherketoneketone.

14. The carrier head of claim 11, wherein at least a bottom portion of the retainer includes polybenzimidazole.

15. The carrier head of claim 11, wherein at least a bottom portion of the retainer includes a semi-crystalline thermoplastic polyester.

16. The carrier head of claim 11, wherein at least a bottom portion of the retainer includes a long molecular chain molecule produced from poly-paraphenylene terephthalamide.

17. The carrier head of claim 11, wherein the bottom portion of the retaining ring further includes at least one of graphite or carbon fibers.

18. An article for attachment to a carrier head, comprising:

a ring-shaped body configured to be detachably secured at an outer perimeter of a carrier head, the ring-shaped body formed of a polymer and having a plurality of apertures therethrough and a plurality of bosses surrounding the apertures.

19. The article of claim 18, wherein the polymer includes polyphenylenesulfide, carbon fibers and polytetrafluoroethylene.

20. An article for attachment to a carrier head, comprising:

a generally flat annular body configured to be detachably secured at an outer perimeter of a carrier head, the annular body formed of a damping material and having a plurality of apertures therethrough, each aperture configured to allow a connector to pass through the article.

21. The article of claim 20, wherein the damping material includes at least one of polyurethane or polyvinylchoride thermopolastic.