MICROELECTROMECHANICAL SYSTEM PACKAGE AND METHOD FOR MAKING THE SAME
First Claim
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1. A microelectromechanical system package comprising:
- a substrate;
a microelectromechanical transducer mounted on the substrate by a plurality of metal bumps;
a non-conductive polymer ring provided around the microelectromechanical transducer for avoiding the leakage of sound pressure from the microelectromechanical transducer;
an integrated circuit mounted on the substrate by a plurality of metal bumps for matching the impedance of the micromechanical system transducer or amplifying the electrical signals; and
an electrically conductive bridge for electrically connecting the integrate circuit to the substrate.
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Abstract
A microelectromechanical system package includes a substrate, a microelectromechanical system transducer mounted on the substrate by a plurality of metal bumps, a non-conductive polymer ring provided around the microelectromechanical transducer for avoiding the leakage of sound pressure from the microelectromechanical transducer, an integrated circuit mounted on the substrate by a plurality of metal bumps for matching the impedance of the microelectromechanical system transducer or amplifying the electric signals and an electrically conductive bridge for electrically connecting the integrate circuit to the substrate.
52 Citations
19 Claims
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1. A microelectromechanical system package comprising:
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a substrate; a microelectromechanical transducer mounted on the substrate by a plurality of metal bumps; a non-conductive polymer ring provided around the microelectromechanical transducer for avoiding the leakage of sound pressure from the microelectromechanical transducer; an integrated circuit mounted on the substrate by a plurality of metal bumps for matching the impedance of the micromechanical system transducer or amplifying the electrical signals; and an electrically conductive bridge for electrically connecting the integrate circuit to the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method for making a microelectromechanical system package comprising the steps of:
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providing a substrate; providing a solder pad on the substrate by a screen printing technique; providing, on the substrate, a microelectromechanical system transducer with a plurality of metal bumps and an integrated circuit with a plurality of metal bumps; subjecting the substrate, the microelectromechanical system transducer and the integrated circuit to a reflow process in a reflow oven; providing a non-conductive polymer ring around the microelectromechanical transducer; providing an electrically conductive bridge for electrically connecting the integrated circuit to the substrate; and subjecting the substrate, the microelectromechanical system transducer and the integrated circuit to a curing process. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19)
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Specification