Temperature sensor, temperature control device, temperature controller and temperature-control method

• US 20080043803A1
• Filed: 07/03/2007
• Published: 02/21/2008
• Est. Priority Date: 07/06/2006
• Status: Active Grant

• Current Assignee: Komatsu Ltd.
• Original Assignee: Komatsu Ltd.
• Inventors: Bandoh, Kenichi
• Granted Patent: US 8,191,792 B2
• Time in Patent Office: Days
• US Class Current: 374/100
• CPC Class Codes: G01K 1/143 for measuring surface temperatures
• CPC Class Codes: G01K 7/186 using microstructures
• CPC Class Codes: G05D 23/1919 characterised by the type of controller
• CPC Class Codes: G05D 23/22 the sensing element being a thermocouple

Abstract

A temperature sensor (10) includes: a temperature-sensing portion for measuring a temperature of an object (50) by contacting the object; and a supporting portion for supporting the temperature-sensing portion from a side opposite to a contact surface, the supporting portion having a space at a portion partially corresponding to the temperature-sensing portion. A temperature controller includes: a temperature control device; the temperature sensor (10) for measuring the temperature by contacting the object (50); and a controller for controlling the temperature control device. The controller includes: a mounting-state judging means for judging a mounting-state of the object (50); a switching means for switching a control gain and a target temperature of the temperature control device based on the judging result; and a control-command generating means for generating a control command based on the control gain, the target temperature and a measurement value of the temperature sensor (10).

Claims

1. A temperature sensor that measures a temperature of a measured object, comprising:

a temperature-sensing portion having a plane contact surface, the temperature-sensing portion measuring the temperature of the object with the contact surface contacting the object; and

a supporting portion that supports the temperature-sensing portion from a side opposite to the contact surface, the supporting portion having a space at a portion that partially corresponds to the temperature-sensing portion.

2. The temperature sensor according to claim 1, wherein the supporting portion is made of a resin or glass.

3. The temperature sensor according to claim 1, further comprising:

a biasing member that biases the temperature-sensing portion to the object.

4. The temperature sensor according to claim 3, wherein the supporting portion is provided between the temperature-sensing portion and the biasing member.

5. The temperature sensor according to claim 4, wherein the biasing member is a bellows.

6. The temperature sensor according to claim 1, further comprising:

a conductor connected to the temperature-sensing portion, wherein

the conductor is connected to the temperature-sensing portion on the side opposite to the contact surface.

7. A temperature sensor that measures a temperature of a measured object, comprising:

a temperature-sensing portion having a plane contact surface, the temperature-sensing portion measuring the temperature of the object with the contact surface contacting the object;

a supporting portion that supports the temperature-sensing portion from a side opposite to the contact surface;

a biasing member having an end portion provided at an end in a biasing direction and a hole provided in the end portion, the biasing member biasing the temperature-sensing portion to the object; and

a conductor connected to the temperature-sensing portion, the conductor being drawn from the temperature-sensing portion to an outside, wherein

the supporting portion and the end portion of the biasing member define a space at a portion that partially corresponds to the temperature-sensing portion, and

the conductor is drawn from the temperature-sensing portion to the outside through an inside of the supporting portion, the hole of the biasing member and an inside of the biasing member.

8. A temperature control device that adjusts a temperature of a measured object mounted thereon, comprising:

a plate body on which the object is mounted;

a temperature control means that adjusts the temperature of the object by heating or cooling the object; and

a temperature sensor provided on the plate body, wherein

the temperature sensor includes;

a temperature-sensing portion having a plane contact surface, the temperature-sensing portion measuring the temperature of the object with the contact surface contacting the object; and

a supporting portion that supports the temperature-sensing portion from a side opposite to the contact surface, the supporting portion having a space at a portion that partially corresponds to the temperature-sensing portion.

9. A temperature controller that controls a temperature of an object to be temperature-controlled, comprising:

a temperature control device that adjusts the temperature of the object mounted thereon;

a temperature sensor that measures the temperature by contacting the object mounted on the temperature control device; and

a controller that controls a heating amount or a cooling amount applied by the temperature control device, wherein

the controller includes;

a mounting-state judging means that judges a mounting state of the object on the temperature control device;

a switching means that, based on a judging result of the mounting-state judging means, switches a control gain and a target temperature that are used for generating a control command for the temperature control device; and

a control command generating means that generates the control command based on the control gain, the target temperature and a measurement value of the temperature sensor.

10. A temperature controller that controls a temperature of an object to be temperature-controlled, comprising:

a temperature control device that adjusts the temperature of the object mounted thereon;

a first temperature sensor that measures the temperature by contacting the object mounted on the temperature control device;

a second temperature sensor that measures a temperature of the temperature control device; and

a controller that controls a heating amount or a cooling amount applied by the temperature control device, wherein

the controller includes;

a mounting-state judging means that judges a mounting state of the object on the temperature control device; and

a switching means that, based on a judging result of the mounting-state judging means, switches a temperature measurement value that is used for generating a control command for the temperature control device between a measurement value of the first temperature sensor and a measurement value of the second temperature sensor.

11. A temperature controller that controls a temperature of an object to be temperature-controlled, comprising:

a temperature control device that adjusts the temperature of the object mounted thereon;

a first temperature sensor that measures the temperature by contacting the object mounted on the temperature control device;

a second temperature sensor that measures a temperature of the temperature control device; and

a controller that controls a heating amount or a cooling amount applied by the temperature control device, wherein

the controller includes;

a mounting-state judging means that judges a mounting state of the object on the temperature control device;

a switching means that, based on a judging result of the mounting-state judging means, switches a temperature measurement value that is used for generating a control command for the temperature control device between a measurement value of the first temperature sensor and a measurement value of the second temperature sensor and switches a control gain and a target temperature that are used for generating the control command, and

a control command generating means that generates the control command based on the temperature measurement value, the control gain and the target temperature.

12. A method for controlling a temperature of an object to be temperature-controlled, using:

a temperature control device that adjusts the temperature of the object mounted thereon; and

a temperature sensor that measures the temperature by contacting the object mounted on the temperature control device, comprising;

a step to obtain a measurement value of the temperature sensor;

a step to judge a mounting state of the object on the temperature control device;

a step to switch a control gain and a target temperature that are used for generating a control command for the temperature control device based on a judging result of the mounting state of the object; and

a step to generate the control command based on the control gain, the target temperature and the measurement value of the temperature sensor.

13. A method for controlling a temperature of an object to be temperature-controlled, using:

a temperature control device that adjusts the temperature of the object mounted thereon;

a first temperature sensor that measures the temperature by contacting the object mounted on the temperature control device; and

a second temperature sensor that measures a temperature of the temperature control device, comprising;

a step to obtain measurement values of the first temperature sensor and the second temperature sensor;

a step to judge a mounting state of the object on the temperature control device;

a step to switch a temperature measurement value that is used for generating a control command for the temperature control device between the measurement value of the first temperature sensor and the measurement value of the second temperature sensor based on a judging result of the mounting state of the object; and

a step to generate the control command based on the temperature measurement value, the control gain and the target temperature.

14. A method for controlling a temperature of an object to be temperature-controlled, using:

a temperature control device that adjusts the temperature of the object mounted thereon;

a first temperature sensor that measures the temperature of the object mounted on the temperature control device by contacting the object; and

a second temperature sensor that measures a temperature of the temperature control device, comprising;

a step to obtain measurement values of the first temperature sensor and the second temperature sensor;

a step to judge a mounting state of the object on the temperature control device;

a step to switch a temperature measurement value that is used for generating a control command for the temperature control device between the measurement value of the first temperature sensor and the measurement value of the second temperature sensor and to switch a control gain and a target temperature that are used for generating the control command based on a judging result of the mounting state of the object; and

a step to generate the control command based on the temperature measurement value, the control gain and the target temperature.