Plasma Generation Device

• US 20080050291A1
• Filed: 10/05/2005
• Published: 02/28/2008
• Est. Priority Date: 10/18/2004
• Status: Abandoned Application

• Current Assignee: Yutaka Electronics Industry Co. Ltd.
• Original Assignee: Yutaka Electronics Industry Co. Ltd.
• Inventors: Nagasawa, Takeshi
• Application Number:
  US10/565,602
• Publication Number:
  US 20080050291A1
• Time in Patent Office: Days
• US Class Current: 422/186.04
• CPC Class Codes: H05H 1/24 Generating plasma nuclear fusion reactors G21B1/00; gas-filled discharge reactors H01J37/32
• CPC Class Codes: H05H 1/47 using corona discharges
• CPC Class Codes: H05H 1/473 Cylindrical electrodes, e.g. rotary drums
• CPC Class Codes: H05H 1/52 using exploding wires or spark gaps H05H1/26 takes precedence; spark gaps in general H01T

Abstract

A plasma generation device that can efficiently generate plasma at atmospheric pressure without producing arc discharge is provided. The plasma generation device, which comprises an electrode bar 1, a cylindrical electrode 2, and a pulse power supply 11 generating a pulse voltage, generates plasma by an electric discharge induced between the electrode bar 1 and cylindrical electrode 2 by applying a predetermined pulse voltage to a point between the electrode bar 1 and cylindrical electrode 2.

Claims

1. A plasma generation device comprising a first electrode, a second electrode, and a pulse power supply for generating a pulse voltage, wherein plasma is generated by an electric discharge induced between said first electrode and said second electrode by applying a predetermined pulse voltage from said pulse power supply to a point between said first electrode and said second electrode.

3. The plasma generation device according to claim 1, wherein said first electrode is an electrode bar and said second electrode is a cylindrical electrode, and said electrode bar is disposed at the center of said cylindrical electrode, forming coaxial cylindrical electrodes.

4. The plasma generation device according to claim 1, further comprising a third electrode plate for directing said plasma to a desired jetting direction.

5. A multiple-type plasma generation apparatus comprising a plurality of plasma generation devices according to claim 3.

6. The plasma generation device according to claim 1, wherein said first electrode is an electrode bar and said second electrode is an electrode plate, wherein one end of said electrode bar is disposed facing a surface of said electrode plate, with a predetermined distance therebetween.

7. The plasma generation device according to claim 6, comprising a plurality of said electrode bars.

8. The plasma generation device according to claim 7, wherein said plurality of electrode bars are disposed apart with a predetermined distance therebetween.

9. The plasma generation device according to claim 7, wherein said plurality of electrode bars are disposed such that a central electrode bar is closer to said electrode plate than the other electrode bars.

10. The plasma generation device according to claim 7, wherein said plurality of electrode bars are disposed such that none of the electrode bars are disposed at the center.

11. The plasma generation device according to claim 1, said first electrode being made of iridium alloy.

12. The plasma generation device according to claim 1, said first electrode being made of tungsten.

2. A plasma generation device comprising a first electrode, a second electrode, and a high frequency power supply for generating a high frequency voltage, wherein plasma is generated by an electric discharge induced by applying a predetermined high frequency voltage from said high frequency power supply to a point between said first electrode and said second electrode.