Thin film battery having textured layer

• US 20080050656A1
• Filed: 08/25/2006
• Published: 02/28/2008
• Est. Priority Date: 08/25/2006
• Status: Active Grant

• Current Assignee: Google Technology Holdings LLC (Alphabet Inc.)
• Original Assignee: Motorola Mobility, Inc. (Lenovo Group Ltd.)
• Inventors: Eisenbeiser, Kurt W.
• Granted Patent: US 7,682,733 B2
• Time in Patent Office: Days
• US Class Current: 429/241
• CPC Class Codes: H01M 10/0562 Solid materials
• CPC Class Codes: H01M 10/058 Construction or manufacture
• CPC Class Codes: H01M 4/70 characterised by shape or form
• CPC Class Codes: H01M 6/40 Printed batteries , e.g. thin film batteries
• CPC Class Codes: Y02E 60/10 Energy storage using batteries
• CPC Class Codes: Y02P 70/50 Manufacturing or production processes characterised by the final manufactured product
• CPC Class Codes: Y10T 29/49115 including coating or impregnating

Abstract

A monolithically integrated lithium thin film battery (10) provides increased areal capacity on a single level (without stacking of multiple cells). The Lithium thin film battery (10) comprises a substrate (12) having a surface (13) textured to comprise a plurality of openings (16) having sides (15) angled between 10 and 80 degrees to the surface (13). A current collector (18) and a cathode (22) are formed on the substrate (12) and within the openings (16). An electrolyte (24) comprising lithium phorphous oxynitride is formed by physical vapor deposition on the cathode (22), thereby providing a layer on the surface of the cathode (22) and within the openings (16) of the cathode having substantially the same thickness. An anode (26) and a capping layer (28) are then formed on the electrolyte (24).

Claims

1. A thin film battery comprising:

a current collector having a surface configured to comprise a plurality of openings having sides angled between 10 and 80 degrees to the surface;

a cathode formed on the current collector including within the openings;

an electrolyte formed by physical vapor deposition on the cathode including within the openings; and

an anode formed on the electrolyte including within the openings.

2. The thin film battery of claim 1 wherein the sides are angled between 54 and 72 degrees to the surface.

3. The thin film battery of claim 1 wherein the electrolyte comprises substantially the same thickness on the surface and on the sides.

4. The thin film battery of claim 3 wherein the electrolyte comprises lithium phorphous oxynitride.

5. The thin film battery of claim 1 wherein the openings comprise grooves.

6. The thin film battery of claim 1 wherein the openings comprise an irregular depth and spacing.

7. The thin film battery of claim 1 further comprising a capping layer formed on the anode.

8. A thin film battery comprising:

a substrate having a surface textured to comprise a plurality of openings having sides angled between 10 and 80 degrees to the surface;

a current collector formed on the substrate;

a cathode formed on the current collector;

an electrolyte comprising lithium phorphous oxynitride formed by physical vapor deposition on the cathode; and

an anode formed on the electrolyte.

9. The thin film battery of claim 8 wherein the sides are angled between 54 and 72 degrees to the surface.

10. The thin film battery of claim 8 wherein the electrolyte comprises substantially the same thickness on the surface and on the sides.

11. The thin film battery of claim 8 wherein the openings comprise grooves.

12. The thin film battery of claim 8 wherein the openings comprise an irregular depth and spacing.

13. The thin film battery of claim 8 further comprising a capping layer formed on the anode.

14. A method of fabricating a thin film battery, comprising:

configuring a current collector having a surface to form a plurality of openings in the surface, the openings having sides angled between 10 and 80 degrees to the surface;

forming a cathode on the surface and within the openings of the current collector;

depositing an electrolyte by physical vapor deposition on the cathode including within the openings; and

forming an anode on the electrolyte.

15. The thin film battery of claim 14 wherein the configuring step comprises sides angled between 54 and 72 degrees to the surface.

16. The thin film battery of claim 14 wherein the depositing step comprises depositing the electrolyte comprises substantially the same thickness on the surface and on the sides.

17. The thin film battery of claim 16 wherein the depositing step comprises depositing lithium phorphous oxynitride.

18. The thin film battery of claim 14 wherein the configuring step comprises forming the plurality of openings as a plurality of grooves.

19. The thin film battery of claim 14 wherein the configuring step comprises forming the plurality of openings having an irregular depth and spacing.

20. The thin film battery of claim 14 further comprising forming a capping layer on the anode.