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Magnetic MEMS sensors

  • US 20080052932A1
  • Filed: 09/01/2006
  • Published: 03/06/2008
  • Est. Priority Date: 09/01/2006
  • Status: Active Grant
First Claim
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1. A magnetic field sensor comprising:

  • a substrate having a surface;

    a first magneto-impedance magnetic field detector positioned on the surface;

    a second magneto-impedance magnetic field detector positioned on the surface proximate to the first magneto-impedance magnetic field detector; and

    a third magnetic field detector positioned on the surface proximate to the first and second magneto-impedance magnetic field detectors,wherein each of the first, second and third magnetic field detector is capable of detecting external magnetic fields that are mutually orthogonal along three directions.

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