ANGULAR VELOCITY SENSOR STRUCTURE

• US 20080053225A1
• Filed: 09/13/2007
• Published: 03/06/2008
• Est. Priority Date: 08/31/2006
• Status: Active Grant

• Current Assignee: Barun Electronics Co., Ltd.
• Original Assignee: Barun Electronics Co., Ltd.
• Inventors: Lee, Sang Chul, Kim, Sung Wook
• Granted Patent: US 7,607,349 B2
• Time in Patent Office: Days
• US Class Current: 73/504.12
• CPC Class Codes: G01C 19/56 Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0814 for translational movement of the mass, e.g. shuttle type

Abstract

An angular velocity sensor structure for improving the off-axis sensitivity is provided in which a structure for detecting an off-axis acceleration component applied to the angular velocity sensor structure is directly adapted to the sensor structure, thereby measuring the off-axis acceleration component actually applied to the sensor structure without distortion.

Claims

1. An angular velocity sensor structure comprising:

an angular velocity detecting unit formed in a board;

a driving unit for an angular velocity sensor for driving the angular velocity detecting unit; and

an off-axis acceleration detecting unit provided in the same board as the angular velocity detecting unit and driven by the driving unit for the angular velocity sensor for detecting the off-axis acceleration by the motion of the driving unit.

2. The angular velocity sensor structure according to claim 1, wherein the angular velocity detecting unit and the off-axis acceleration detecting unit have the same capacitance.

3. The angular velocity sensor structure according to claim 1, wherein the angular velocity detecting unit and the off-axis acceleration detecting unit have the same structure.

4. The angular velocity sensor structure according to claim 1, wherein the angular velocity detecting unit and the off-axis acceleration detecting unit have the same capacitance and structure.