Microsystem, more particularly microgyrometer, with capacitive electrode detection element
First Claim
1. A microsystem provided in a flat substrate and comprising:
- at least two oscillating masses connected to the substrate by flexible suspension means,excitation means for exciting said oscillating masses in a predetermined excitation direction,and detection means for detecting movement of said oscillating masses in a measuring direction perpendicular to said excitation direction,said detection means comprising an excitation frame associated with each oscillating mass, and a mobile detection element surrounded by the corresponding excitation frame and comprising a plurality of mobile electrodes, and first and second sets of interconnected fixed electrodes fixedly secured to the substrate on which they are formed, each mobile electrode being arranged between associated fixed electrodes of the first and second sets to form two variable differential capacitors,wherein the fixed electrodes of each set are interconnected by means of interconnection bars made of electrically conducting material, extending above the fixed electrodes in a plane substantially parallel to the substrate.
1 Assignment
0 Petitions
Accused Products
Abstract
The microgyrometer is provided in a flat substrate and comprises detection means for detecting the movement of two oscillating masses in a measuring direction perpendicular to an excitation direction. The detection means comprise an excitation frame associated with each oscillating mass and a mobile detection element surrounded by a corresponding excitation frame and comprising a plurality of mobile electrodes, and first and second sets of interconnected fixed electrodes fixedly secured to the substrate on which they are formed. Each mobile electrode is disposed between associated fixed electrodes of the first and second sets to form two variable differential capacitors. The fixed electrodes of each set are interconnected by means of interconnection bars made of electrically conducting material extending above the fixed electrodes in a plane substantially parallel to the substrate.
-
Citations
10 Claims
-
1. A microsystem provided in a flat substrate and comprising:
-
at least two oscillating masses connected to the substrate by flexible suspension means, excitation means for exciting said oscillating masses in a predetermined excitation direction, and detection means for detecting movement of said oscillating masses in a measuring direction perpendicular to said excitation direction, said detection means comprising an excitation frame associated with each oscillating mass, and a mobile detection element surrounded by the corresponding excitation frame and comprising a plurality of mobile electrodes, and first and second sets of interconnected fixed electrodes fixedly secured to the substrate on which they are formed, each mobile electrode being arranged between associated fixed electrodes of the first and second sets to form two variable differential capacitors, wherein the fixed electrodes of each set are interconnected by means of interconnection bars made of electrically conducting material, extending above the fixed electrodes in a plane substantially parallel to the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
-
Specification