SEMICONDUCTOR LAYER STRUCTURE WITH SUPERLATTICE
First Claim
1. A semiconductor layer structure, comprising a superlattice composed of stacked layers of a first and at least one second type, wherein said layers of said first type and of said at least one second type are III-V compound semiconductors, adjacent layers of different types in said superlattice differ in composition with respect to at least one element, at least two layers of the same type in said superlattice have a different content of at least one element, the content of at least one element is graded within a said layer of said superlattice, said layers of said superlattice contain dopants in predefined concentrations, with said superlattice comprising layers that are doped with different dopants.
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Abstract
The semiconductor layer structure includes a superlattice (9) composed of stacked layers (9a, 9b) of III-V compound semiconductors of a first (a) and at least one second type (b). Adjacent layers of different types in the superlattice (9) differ in composition with respect to at least one element, at least two layers of the same type have a different content (cAl, cIn) of the at least one element, the content (cAl, cIn) of the at least one element is graded within a layer (9a, 9b) of the superlattice (9), and the layers (9a, 9b) of the superlattice contain dopants in predefined concentrations, with the superlattice (9) comprising layers (9a, 9b) that are doped with different dopants. In this way, the electrical, optical and epitaxial properties of the superlattice (9) can be adapted in the best possible manner to given requirements, particularly epitaxial constraints.
88 Citations
15 Claims
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1. A semiconductor layer structure, comprising a superlattice composed of stacked layers of a first and at least one second type, wherein
said layers of said first type and of said at least one second type are III-V compound semiconductors, adjacent layers of different types in said superlattice differ in composition with respect to at least one element, at least two layers of the same type in said superlattice have a different content of at least one element, the content of at least one element is graded within a said layer of said superlattice, said layers of said superlattice contain dopants in predefined concentrations, with said superlattice comprising layers that are doped with different dopants.
Specification