SUBSTRATE STRUCTURES AND FABRICATION METHODS THEREOF

• US 20080054255A1
• Filed: 01/22/2007
• Published: 03/06/2008
• Est. Priority Date: 08/29/2006
• Status: Active Grant

• Current Assignee: HannStar Display Corporation
• Original Assignee: Industrial Technology Research Institute
• Inventors: Lin, Wei-Ling, Wei, Gary, Hsiao, Ming-Chun, Chan, Lih-Hsiung
• Granted Patent: US 7,679,081 B2
• Time in Patent Office: Days
• US Class Current: 257/40
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: H01L 29/0665 the shape of the body defining a nanostructure nanotechnology per se B82B
• CPC Class Codes: H01L 29/0673 oriented parallel to a substrate
• CPC Class Codes: H01L 29/43 characterised by the materials of which they are formed
• CPC Class Codes: H05K 1/0393 Flexible materials H05K1/038 takes precedence; specific organic compositions are classified in H05K1/0313 and subgroups
• CPC Class Codes: H05K 2201/0251 Non-conductive microfibers relatively short elongated particles H05K2201/0248
• CPC Class Codes: H05K 2201/026 Nanotubes or nanowires
• CPC Class Codes: H05K 2203/016 Temporary inorganic, non-metallic carrier, e.g. for processing or transferring
• CPC Class Codes: H05K 3/207 using a prefabricated paste pattern, ink pattern or powder pattern
• CPC Class Codes: H10K 77/111 Flexible substrates

Abstract

Substrate structures and fabrication methods thereof. A substrate structure includes a bendable substrate and an inorganic electrode structure on the bendable structure, wherein the inorganic electrode structure includes a conductive layer or a semiconductor layer. The inorganic electrode structure includes carbon nanotubes, carbon nanofibers, a nanolinear material, or a micro-linear material. The bendable substrate includes polyethylene (PE), polyimide (PI), polyvinyl alcohol (PVA), or polymethyl methacrylate (PMMA).

Claims

1. A substrate structure, comprising:

a bendable substrate; and

an inorganic electrode structure on the bendable structure,

wherein the inorganic electrode structure comprises a conductive layer or a semiconductor layer.

2. The substrate structure according to claim 1, wherein the inorganic electrode structure further comprises carbon nanotubes, carbon nanofibers, a nanolinear material, or a micro-linear material.

3. The substrate structure according to claim 1, wherein the bendable substrate comprises polyethylene (PE), polyimide (PI), polyvinyl alcohol (PVA), polymethyl methacrylate (PMMA).

4. The substrate structure according to claim 1, wherein the inorganic electrode structure is a cathode structure comprising a planar triode structure, a vertical triode structure, or an under-gate triode structure.

5. A method for fabricating a substrate structure, comprising;

providing a first substrate;

screen printing an inorganic electrode structure on the first substrate;

applying a bendable substrate on the first substrate covering the inorganic electrode structure; and

releasing the bendable substrate from the first substrate such that the inorganic electrode structure is attached to the bendable substrate.

6. The method for fabricating a substrate structure according to claim 5, wherein screen printing an inorganic electrode structure comprises forming a cathode, an electron emitter, and a gate on the first substrate.

7. The method for fabricating a substrate structure according to claim 5, wherein the inorganic electrode structure is a cathode structure comprising a planar triode structure, a vertical triode structure, or an under-gate triode structure.

8. The method for fabricating a substrate structure according to claim 5, wherein the inorganic electrode structure further comprises carbon nanotubes, carbon nanofibers, a nanolinear material, or a micro-linear material.

9. The method for fabricating a substrate structure according to claim 5, wherein the bendable substrate comprises polyethylene (PE), polyimide (PI), polyvinyl alcohol (PVA), or polymethyl methacrylate (PMMA).