Wafer-level encapsulation and sealing of electrostatic transducers
First Claim
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1. Microelectromechanical apparatus, comprising:
- a substrate;
one or more movable microelectromechanical elements formed in the substrate; and
one or more stationary elements that comprise electrically operative elements of the apparatus and that comprise a protective layer for the movable microelectromechanical elements.
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Abstract
Disclosed are encapsulated microelectromechanical devices that are integrated with integrated circuit devices in the same substrate. Exemplary microelectromechanical apparatus comprises a substrate, one or more movable microelectromechanical elements formed in the substrate, and one or more stationary elements that are electrically operative elements of the apparatus and that form a protective layer for the movable microelectromechanical elements. Reduced to practice devices include acoustic resonators whose stationary electrodes also encapsulate the resonators. CMOS integrated circuit devices may be formed on the substrate beside or on top of the microelectromechanical devices.
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Citations
20 Claims
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1. Microelectromechanical apparatus, comprising:
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a substrate;
one or more movable microelectromechanical elements formed in the substrate; and
one or more stationary elements that comprise electrically operative elements of the apparatus and that comprise a protective layer for the movable microelectromechanical elements. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. Acoustic resonator apparatus, comprising:
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a silicon resonating micromechanical element formed in a substrate; and
one or more stationary electrodes separated from the resonating element by narrow capacitive gaps, wherein the electrodes extend on top of the resonating element to encapsulate it. - View Dependent Claims (15, 16, 17, 18)
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19. Microelectromechanical apparatus, comprising:
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a substrate; and
a microelectromechanical structure formed in the substrate comprising one or more top electrodes, which electrodes encapsulate the apparatus. - View Dependent Claims (20)
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Specification