Exposure apparatus, device manufacturing method, cleaning method, and cleaning member
First Claim
Patent Images
1. An exposure apparatus that exposes a substrate with exposure light, comprising:
- a first member that can form liquid immersion with a first liquid so as to fill an optical path for the exposure light with the first liquid;
a second member that is disposed apart form the first member and between which and a predetermined member can be formed liquid immersion with a second liquid; and
a vibration generator that imparts vibration to the second liquid between the second member and the predetermined member.
1 Assignment
0 Petitions
Accused Products
Abstract
An exposure apparatus is provided with a first member that can form liquid immersion with a first liquid so as to fill an optical path for exposure light with the first liquid, a second member that can form liquid immersion with a second liquid in a position distanced from the first member, and a vibration generator that imparts vibration to the second liquid between the predetermined member and the second member. The predetermined member is cleaned with the second liquid.
-
Citations
58 Claims
-
1. An exposure apparatus that exposes a substrate with exposure light, comprising:
-
a first member that can form liquid immersion with a first liquid so as to fill an optical path for the exposure light with the first liquid; a second member that is disposed apart form the first member and between which and a predetermined member can be formed liquid immersion with a second liquid; and a vibration generator that imparts vibration to the second liquid between the second member and the predetermined member. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 43)
-
-
26. An exposure apparatus that exposes a substrate with exposure light via a liquid, comprising:
-
a flexible member; a driving device that moves the flexible member; an observation device that is provided on a distal end side of the flexible member, and that enables observation of a contamination status of a predetermined member having been in contact with the liquid; and an output device that is provided on a base end side of the flexible member, and that outputs an observation result from the observation device. - View Dependent Claims (27, 28, 29, 30)
-
-
31. An exposure apparatus that exposes a substrate with exposure light via a first liquid, comprising:
-
an optical element through which the exposure light transmits; a predetermined member which is movable at a light emitting side of the optical element; and a vibration generator that imparts vibration to a liquid on the predetermined member, by vibrating the predetermined member. - View Dependent Claims (32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42)
-
-
44. A method for cleaning a predetermined member of an exposure apparatus that exposes a substrate with exposure light via a first liquid, the method comprising:
-
forming liquid immersion with a second liquid on the predetermined member in a position distanced from an optical path of the exposure light; and imparting vibration to the second liquid on the predetermined member to clean the predetermined member. - View Dependent Claims (47, 48, 49, 50, 51, 52)
-
-
45. A method for cleaning a predetermined member of an exposure apparatus that exposes a substrate with exposure light via a first liquid, the method comprising:
-
observing the predetermined member using an observation device provided on a distal end side of a flexible member; and cleaning the predetermined member by operating a cleaning device using an operating device based on the observation result, the cleaning device being provided on a distal end side of the flexible member, the operating device being provided on a base end side of the flexible member. - View Dependent Claims (46)
-
-
53. A cleaning method of a liquid immersion exposure apparatus that exposes a substrate with exposure light, the method comprising:
-
holding a plate member by a holding section of a substrate stage that can hold the substrate, and forming liquid immersion of a liquid between a first member and the plate member; moving an interface of the liquid between the first member and the plate member to remove a foreign substance attached to the first member from the first member; and unloading the plate member from the substrate stage. - View Dependent Claims (54, 55)
-
-
56. A cleaning method of a liquid immersion exposure apparatus that exposes a substrate with exposure light, the method comprising:
-
forming liquid immersion on the predetermined member that is movable at a light emitting side of an optical element through which the exposure light transits; and imparting vibration to a liquid on the predetermined member by vibrating the mined member.
-
-
57. A cleaning member that is detachably held by a holding section of a substrate stage that can hold a substrate onto which exposure light is irradiated and that is used for cleaning a first member, comprising:
-
a face between which and the predetermined member is formed liquid immersion of a liquid, wherein the face can hold a foreign substance that has been removed from the first member by a cleaning operation using the liquid. - View Dependent Claims (58)
-
Specification