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METHOD AND APPARATUS FOR A REFLECTIVE SPATIAL LIGHT MODULATOR WITH A FLEXIBLE PEDESTAL

  • US 20080055709A1
  • Filed: 05/23/2007
  • Published: 03/06/2008
  • Est. Priority Date: 07/28/2004
  • Status: Active Grant
First Claim
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1. An electromechanical system disposed in an array configuration, the electromechanical system comprising:

  • a substrate comprising a surface region including an array of electrodes, each of the array of electrodes being provided in pairs and configured to support a first voltage and a second voltage different from the first voltage; and

    an array of moveable structures, each of the array of moveable structures being associated with a pair of electrodes of the array of electrodes, each of the array of moveable structures including;

    a flexible member comprising a first end coupled to the surface region of the substrate and a second end opposing the first end, wherein a length is defined between the first end and the second end;

    a base region within a first portion of the flexible member, the base region being defined from the first end to a first predetermined portion of the length of the flexible member;

    a tip region within a second portion of the flexible member, the tip region being defined from the second end to a second predetermined portion of the length of the flexible member; and

    a moveable surface coupled to the flexible member and comprising a frontside region and a backside region, the backside region being coupled to the second end of the flexible member, wherein a normal of the frontside region is configured to be oriented at a first angle with respect to the surface region in response to the first voltage and oriented at a second angle with respect to the surface region in response to the second voltage.

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