MEMS variable capacitor and method for producing the same
First Claim
1. A variable capacitor comprising:
- first and second electrically conductive electrodes arranged above a support structure, the electrodes defining the capacitance of the capacitor and being arranged such that orthogonal projections of the electrodes on the plane of the support structure are non-overlapping, at least one of the electrodes comprising at least one bendable portion being movable perpendicular to the support structure; and
an actuation element configured to apply a voltage difference between the electrodes to actuate the bendable portion thus varying the capacitance of the variable capacitor.
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Accused Products
Abstract
One inventive aspect relates a variable capacitor comprising first and second electrically conductive electrodes, arranged above a support structure and spaced apart from each other and defining the capacitance of the capacitor. At least one of the electrodes comprises at least one bendable portion. The bendable portion(s) are actuated by a DC voltage difference which is applied over the electrodes to vary the capacitance. In preferred embodiments, the support structure comprises a layer of higher permittivity than the atmosphere surrounding the electrodes and the electrodes configure as an interdigitated structure upon actuation. Also disclosed is a 2-mask process for producing such capacitors.
24 Citations
29 Claims
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1. A variable capacitor comprising:
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first and second electrically conductive electrodes arranged above a support structure, the electrodes defining the capacitance of the capacitor and being arranged such that orthogonal projections of the electrodes on the plane of the support structure are non-overlapping, at least one of the electrodes comprising at least one bendable portion being movable perpendicular to the support structure; and
an actuation element configured to apply a voltage difference between the electrodes to actuate the bendable portion thus varying the capacitance of the variable capacitor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. A method of producing a variable capacitor in a 2-mask process, comprising:
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providing a sacrificial layer on a support substrate;
producing a conductive layer on the sacrificial layer in a predetermined plane;
patterning the conductive layer so as to define first and second electrodes of the variable capacitor, at least one of which comprises at least one bendable portion; and
releasing the at least one bendable portion by local removal of the sacrificial layer, whereby the bendable portion or portions curl out of the plane of the conductive layer. - View Dependent Claims (24, 25, 26)
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27. A variable capacitor comprising:
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means formed above a support structure for defining the capacitance, the defining means further comprising means being movable perpendicular to the support structure and thus varying the capacitance; and
means for controlling the movement of the movable means. - View Dependent Claims (28, 29)
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Specification