ACOUSTIC RESONATOR PERFORMANCE ENHANCEMENT USING FILLED RECESS REGION
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Accused Products
Abstract
An acoustic resonator that includes a substrate, a first electrode, a layer of piezoelectric material, a second electrode, and a fill region. The first electrode is adjacent the substrate, and the first electrode has an outer perimeter. The piezoelectric layer is adjacent the first electrode. The second electrode is adjacent the piezoelectric layer and the second electrode has an outer perimeter. The fill region is in one of the first and second electrodes.
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Citations
29 Claims
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1-23. -23. (canceled)
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24. A method for fabricating an acoustic resonator comprising:
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providing a substrate;
fabricating a first electrode adjacent the substrate;
fabricating a piezoelectric layer adjacent the first electrode;
depositing electrode material to form a second electrode up to a first thickness adjacent the piezoelectric layer;
depositing a first photo mask over the second electrode;
depositing additional electrode material to form the second electrode up to a second thickness;
removing the photo mask thereby revealing a recessed region in the second electrode; and
filling the recessed region with a fill material. - View Dependent Claims (25, 26, 27, 28)
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29. A method for fabricating an acoustic resonator comprising:
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providing a substrate;
fabricating a first electrode adjacent the substrate;
fabricating a piezoelectric layer adjacent the first electrode;
depositing electrode material to form a second electrode;
depositing a first photo mask over the second electrode;
etching the second electrode to form a recessed region in the second electrode; and
filling the recessed region with a fill material.
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Specification