Angular rate sensor and mounting structure of angular rate sensor
First Claim
1. A mounting structure comprising:
- a sensor; and
a mounting board for mounting the sensor thereon, wherein the sensor includes a vibrator capable of vibrating in a first direction, the sensor detects an angular velocity on the basis of vibration of the vibrator in a second direction in a case where the vibrator is vibrated in the first direction, and where the angular velocity is applied to the sensor in a third direction so that the third direction provides a rotation axis of the angular velocity, the second direction is perpendicular to the first direction, the third direction is perpendicular to both of the first and the second directions, the third direction is in parallel to a horizontal plane perpendicular to a gravitational direction, and the first direction is in parallel to the horizontal plane.
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Abstract
An angular rate sensor includes: a substrate; a drive-purpose vibrator capable of vibrating in a first direction; and an angular velocity detection-purpose vibrator capable of vibrating in a second direction. The sensor detects an angular velocity on the basis of vibration of the angular velocity detection-purpose vibrator in the second direction caused by a Coriolis force, when the drive-purpose vibrator is vibrated in the first direction, and the angular velocity is applied to the sensor in a third direction. The angular velocity detection-purpose vibrator has a length along with the second direction and a width along with the first direction. A ratio between the width and the length is equal to or larger than 0.1.
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Citations
4 Claims
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1. A mounting structure comprising:
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a sensor; and
a mounting board for mounting the sensor thereon, wherein the sensor includes a vibrator capable of vibrating in a first direction, the sensor detects an angular velocity on the basis of vibration of the vibrator in a second direction in a case where the vibrator is vibrated in the first direction, and where the angular velocity is applied to the sensor in a third direction so that the third direction provides a rotation axis of the angular velocity, the second direction is perpendicular to the first direction, the third direction is perpendicular to both of the first and the second directions, the third direction is in parallel to a horizontal plane perpendicular to a gravitational direction, and the first direction is in parallel to the horizontal plane. - View Dependent Claims (2, 3, 4)
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Specification